Patents by Inventor Kai Gruber

Kai Gruber has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Method for forming a micro-surface structure and for producing a micro-electromechanical component
    Patent number: 9637377
    Abstract: The present invention relates to a method for forming a micro-surface structure on a substrate, in particular for producing a micro-electromechanical component, a micro-surface structure of this type, a method for producing a micro-electromechanical component having a micro-surface structure of this type and such a micro-electromechanical component. The invention is particularly relevant for components of microsystem technology (MST, micro-electromechanical systems MEMS) and the construction and connection technology for hermetically housing micro components, preferably using getter materials.
    Type: Grant
    Filed: November 17, 2009
    Date of Patent: May 2, 2017
    Assignee: Fraunhofer-Gesellschaft zur Foerderung der Angewandten Forschung E.V.
    Inventors: Wolfgang Reinert, Jochen Quenzer, Kai Gruber, Stephan Warnat
  • METHOD FOR FORMING A MICRO-SURFACE STRUCTURE AND FOR PRODUCING A MICRO-ELECTROMECHANICAL COMPONENT, MICRO-SURFACE STRUCTURE AND MICRO-ELECTROMECHANICAL COMPONENT HAVING SAID MICRO-SURFACE STRUCTURE
    Publication number: 20110287214
    Abstract: The present invention relates to a method for forming a micro-surface structure on a substrate, in particular for producing a micro-electromechanical component, a micro-surface structure of this type, a method for producing a micro-electromechanical component having a micro-surface structure of this type and such a micro-electromechanical component. The invention is particularly relevant for components of microsystem technology (MST, micro-electromechanical systems MEMS) and the construction and connection technology for hermetically housing micro components, preferably using getter materials.
    Type: Application
    Filed: November 17, 2009
    Publication date: November 24, 2011
    Inventors: Wolfgang Reinert, Jochen Quenzer, Kai Gruber, Stephan Warnat