Patents by Inventor Kai-Kuen Chang
Kai-Kuen Chang has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).
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Publication number: 20240355893Abstract: A semiconductor structure includes a substrate and a first switch element disposed in a first device area of the substrate. The first switch element includes a channel region, a first gate dielectric layer, a first gate layer and a source/drain region. The channel region is disposed at the bottom of a recess in the first device area. The first gate dielectric layer has a first region and a second region extending into the recess, the first region has a first thickness; the second region has a second thickness, and the first thickness is smaller than the second thickness. The first gate layer is disposed above the first gate dielectric layer. The source/drain region is disposed in the substrate and adjacent to the first gate dielectric layer.Type: ApplicationFiled: June 1, 2023Publication date: October 24, 2024Inventor: Kai-Kuen CHANG
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Publication number: 20240222501Abstract: A semiconductor device and a method of fabricating the same includes a substrate, two first field regions, a gate structure, a first isolation structure, and a plurality of second field regions. The two first field regions are disposed in the substrate, and the gate structure is disposed on the substrate, between the two first field regions. The first isolation structure is disposed in one of the two first field regions, under one side of the gate structure. The second field regions are disposed in the substrate, wherein the second field regions are separately and sequentially arranged to surround an outer periphery of the one of the two first field regions.Type: ApplicationFiled: February 9, 2023Publication date: July 4, 2024Applicant: UNITED MICROELECTRONICS CORP.Inventor: Kai-Kuen Chang
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Publication number: 20240154027Abstract: A high voltage semiconductor device includes a semiconductor substrate, a first drift region, a gate structure, a first sub gate structure, a first spacer structure, a second spacer structure, and a first insulation structure. The first drift region is disposed in the semiconductor substrate. The gate structure is disposed on the semiconductor substrate and separated from the first sub gate structure. The first sub gate structure and the first insulation structure are disposed on the first drift region. The first spacer structure is disposed on a sidewall of the gate structure. The second spacer structure is disposed on a sidewall of the first sub gate structure. At least a part of the first insulation structure is located between the first spacer structure and the second spacer structure. The first insulation structure is directly connected with the first drift region located between the first spacer structure and the second spacer structure.Type: ApplicationFiled: January 16, 2024Publication date: May 9, 2024Applicant: UNITED MICROELECTRONICS CORP.Inventors: Hsin-Han Wu, Kai-Kuen Chang, Ping-Hung Chiang
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Patent number: 11923435Abstract: A high voltage semiconductor device includes a semiconductor substrate, a first drift region, a gate structure, a first sub gate structure, a first spacer structure, a second spacer structure, and a first insulation structure. The first drift region is disposed in the semiconductor substrate. The gate structure is disposed on the semiconductor substrate and separated from the first sub gate structure. The first sub gate structure and the first insulation structure are disposed on the first drift region. The first spacer structure is disposed on a sidewall of the gate structure. The second spacer structure is disposed on a sidewall of the first sub gate structure. At least a part of the first insulation structure is located between the first spacer structure and the second spacer structure. The first insulation structure is directly connected with the first drift region located between the first spacer structure and the second spacer structure.Type: GrantFiled: April 18, 2022Date of Patent: March 5, 2024Assignee: UNITED MICROELECTRONICS CORP.Inventors: Hsin-Han Wu, Kai-Kuen Chang, Ping-Hung Chiang
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Publication number: 20230307524Abstract: A high voltage semiconductor device includes a semiconductor substrate, a first drift region, a gate structure, a first sub gate structure, a first spacer structure, a second spacer structure, and a first insulation structure. The first drift region is disposed in the semiconductor substrate. The gate structure is disposed on the semiconductor substrate and separated from the first sub gate structure. The first sub gate structure and the first insulation structure are disposed on the first drift region. The first spacer structure is disposed on a sidewall of the gate structure. The second spacer structure is disposed on a sidewall of the first sub gate structure. At least a part of the first insulation structure is located between the first spacer structure and the second spacer structure. The first insulation structure is directly connected with the first drift region located between the first spacer structure and the second spacer structure.Type: ApplicationFiled: April 18, 2022Publication date: September 28, 2023Applicant: UNITED MICROELECTRONICS CORP.Inventors: Hsin-Han Wu, Kai-Kuen Chang, Ping-Hung Chiang
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Publication number: 20230253481Abstract: A fabricating method of a high voltage transistor includes providing a high voltage transistor. The high voltage transistor includes a substrate. A gate structure is disposed on the substrate. A source drift region and a drain drift region are respectively disposed at two sides of the gate structure and embedded within the substrate. A source is disposed in the source drift region. A drain is disposed within the drain drift region. The steps of fabricating the drain drift region include defining a drain drift region predetermined region on the substrate by using a photo mask. The photo mask includes a first comb-liked pattern. The first comb-liked pattern includes a first rectangle and numerous first tooth structures. Then, an ion implantation process is performed to implant dopants into the drain drift region predetermined region. Then, dopants in the drain drift region predetermined region are diffused to form the drain drift region.Type: ApplicationFiled: March 7, 2022Publication date: August 10, 2023Applicant: UNITED MICROELECTRONICS CORP.Inventor: Kai-Kuen Chang
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Patent number: 10586735Abstract: A method for fabricating a semiconductor device structure is shown. A gate dielectric layer is formed on a substrate. A portion of the gate dielectric layer, which is located on a part of the substrate in which an S/D region is to be formed, is removed. A gate electrode is formed on the remaining gate dielectric layer. A spacer is formed on the sidewall of the gate electrode and the sidewall of the gate dielectric layer. The S/D region is then formed in the part of the substrate beside the spacer.Type: GrantFiled: February 1, 2018Date of Patent: March 10, 2020Assignee: United Microelectronics Corp.Inventors: Kai-Kuen Chang, Shih-Yin Hsiao
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Patent number: 10354878Abstract: A doping method for a semiconductor device including the following steps is provided. A substrate is provided. The substrate has a channel region. The channel region includes a first edge region, a second edge region and a center region in a channel width direction substantially perpendicular to a channel length direction, and the center region is located between the first edge region and the second edge region. A first doping process is performed on the first edge region, the second edge region and the center region by using a first conductive type dopant. A second doping process is performed on the center region by using a second conductive type dopant.Type: GrantFiled: January 10, 2017Date of Patent: July 16, 2019Assignee: United Microelectronics Corp.Inventors: Kai-Kuen Chang, Shih-Yin Hsiao
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Patent number: 10312379Abstract: A high voltage device includes a semiconductor substrate, an ion well, a Schottky diode in the ion well, an isolation structure in the ion well surrounding the Schottky diode, and an assistant gate surrounding the Schottky diode. The assistant gate is disposed only on the isolation structure and is not in direct contact with the ion well.Type: GrantFiled: July 27, 2017Date of Patent: June 4, 2019Assignee: UNITED MICROELECTRONICS CORP.Inventors: Shih-Yin Hsiao, Kai-Kuen Chang, Ching-Chung Yang
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Publication number: 20190006528Abstract: A high voltage device includes a semiconductor substrate, an ion well, a Schottky diode in the ion well, an isolation structure in the ion well surrounding the Schottky diode, and an assistant gate surrounding the Schottky diode. The assistant gate is disposed only on the isolation structure and is not in direct contact with the ion well.Type: ApplicationFiled: July 27, 2017Publication date: January 3, 2019Inventors: Shih-Yin Hsiao, Kai-Kuen Chang, Ching-Chung Yang
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Publication number: 20180197742Abstract: A doping method for a semiconductor device including the following steps is provided. A substrate is provided. The substrate has a channel region. The channel region includes a first edge region, a second edge region and a center region in a channel width direction substantially perpendicular to a channel length direction, and the center region is located between the first edge region and the second edge region. A first doping process is performed on the first edge region, the second edge region and the center region by using a first conductive type dopant. A second doping process is performed on the center region by using a second conductive type dopant.Type: ApplicationFiled: January 10, 2017Publication date: July 12, 2018Applicant: United Microelectronics Corp.Inventors: Kai-Kuen Chang, Shih-Yin Hsiao
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Publication number: 20180158738Abstract: A method for fabricating a semiconductor device structure is shown. A gate dielectric layer is formed on a substrate. A portion of the gate dielectric layer, which is located on a part of the substrate in which an S/D region is to be formed, is removed. A gate electrode is formed on the remaining gate dielectric layer. A spacer is formed on the sidewall of the gate electrode and the sidewall of the gate dielectric layer. The S/D region is then formed in the part of the substrate beside the spacer.Type: ApplicationFiled: February 1, 2018Publication date: June 7, 2018Applicant: United Microelectronics Corp.Inventors: Kai-Kuen Chang, Shih-Yin Hsiao
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Patent number: 9985129Abstract: A high-voltage MOS transistor includes a semiconductor substrate, a gate oxide layer on the semiconductor substrate, a gate on the gate oxide layer, a spacer covering a sidewall of the gate, a source on one side of the gate, and a drain on the other side of the gate. The gate includes at least a first discrete segment and a second discrete segment. The first discrete segment is not in direct contact with the second discrete segment. The spacer fills into a gap between the first discrete segment and the second discrete segment.Type: GrantFiled: November 22, 2017Date of Patent: May 29, 2018Assignee: UNITED MICROELECTRONICS CORP.Inventors: Shih-Yin Hsiao, Kuan-Liang Liu, Ching-Chung Yang, Kai-Kuen Chang, Ping-Hung Chiang, Nien-Chung Li, Wen-Fang Lee, Chih-Chung Wang
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Patent number: 9947746Abstract: A bipolar junction transistor (BJT) device includes a semiconductor substrate, a first doping region with a first conductivity, a second doping region with a second conductivity, a third doping region with the first conductivity, at least one stacked block and a conductive contact. The first doping region is formed in the semiconductor substrate. The second doping region is formed in the first doping region. The at least one stacked block is formed on and insulated from the second doping region. The third doping region is formed in the second doping region and disposed adjacent to the at least one stacked block. The conductive contact electrically connects the at least one stacked block with the third doping region.Type: GrantFiled: August 11, 2016Date of Patent: April 17, 2018Assignee: UNITED MICROELECTRONICS CORP.Inventors: Shih-Yin Hsiao, Kai-Kuen Chang
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Publication number: 20180097104Abstract: A high-voltage MOS transistor includes a semiconductor substrate, a gate oxide layer on the semiconductor substrate, a gate on the gate oxide layer, a spacer covering a sidewall of the gate, a source on one side of the gate, and a drain on the other side of the gate. The gate includes at least a first discrete segment and a second discrete segment. The first discrete segment is not in direct contact with the second discrete segment. The spacer fills into a gap between the first discrete segment and the second discrete segment.Type: ApplicationFiled: November 22, 2017Publication date: April 5, 2018Inventors: Shih-Yin Hsiao, Kuan-Liang Liu, Ching-Chung Yang, Kai-Kuen Chang, Ping-Hung Chiang, Nien-Chung Li, Wen-Fang Lee, Chih-Chung Wang
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Patent number: 9922881Abstract: A method for fabricating a semiconductor device structure is shown. A gate dielectric layer is formed on a substrate. A portion of the gate dielectric layer, which is located on a part of the substrate in which an S/D region is to be formed, is removed. A gate electrode is formed on the remaining gate dielectric layer. A spacer is formed on the sidewall of the gate electrode and the sidewall of the gate dielectric layer. The S/D region is then formed in the part of the substrate beside the spacer.Type: GrantFiled: January 12, 2016Date of Patent: March 20, 2018Assignee: United Microelectronics Corp.Inventors: Kai-Kuen Chang, Shih-Yin Hsiao
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Publication number: 20180047809Abstract: A bipolar junction transistor (BJT) device includes a semiconductor substrate, a first doping region with a first conductivity, a second doping region with a second conductivity, a third doping region with the first conductivity, at least one stacked block and a conductive contact. The first doping region is formed in the semiconductor substrate. The second doping region is formed in the first doping region. The at least one stacked block is formed on and insulated from the second doping region. The third doping region is formed in the second doping region and disposed adjacent to the at least one stacked block. The conductive contact electrically connects the at least one stacked block with the third doping region.Type: ApplicationFiled: August 11, 2016Publication date: February 15, 2018Inventors: Shih-Yin Hsiao, Kai-Kuen Chang
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Patent number: 9859417Abstract: A high-voltage MOS transistor includes a semiconductor substrate, a gate oxide layer on the semiconductor substrate, a gate on the gate oxide layer, a spacer covering a sidewall of the gate, a source on one side of the gate, and a drain on the other side of the gate. The gate includes at least a first discrete segment and a second discrete segment. The first discrete segment is not in direct contact with the second discrete segment. The spacer fills into a gap between the first discrete segment and the second discrete segment.Type: GrantFiled: June 24, 2016Date of Patent: January 2, 2018Assignee: UNITED MICROELECTRONICS CORP.Inventors: Shih-Yin Hsiao, Kuan-Liang Liu, Ching-Chung Yang, Kai-Kuen Chang, Ping-Hung Chiang, Nien-Chung Li, Wen-Fang Lee, Chih-Chung Wang
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Publication number: 20170345926Abstract: A high-voltage MOS transistor includes a semiconductor substrate, a gate oxide layer on the semiconductor substrate, a gate on the gate oxide layer, a spacer covering a sidewall of the gate, a source on one side of the gate, and a drain on the other side of the gate. The gate includes at least a first discrete segment and a second discrete segment. The first discrete segment is not in direct contact with the second discrete segment. The spacer fills into a gap between the first discrete segment and the second discrete segment.Type: ApplicationFiled: June 24, 2016Publication date: November 30, 2017Inventors: Shih-Yin Hsiao, Kuan-Liang Liu, Ching-Chung Yang, Kai-Kuen Chang, Ping-Hung Chiang, Nien-Chung Li, Wen-Fang Lee, Chih-Chung Wang
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Patent number: 9741850Abstract: A semiconductor device having a substrate, a gate electrode, a source and a drain, and a buried gate dielectric layer is disclosed. The buried gate dielectric layer is disposed below said gate electrode and protrudes therefrom to said drain, thereby separating said gate electrode and said drain by a substantial distance to reduce gate induced drain leakage.Type: GrantFiled: August 12, 2016Date of Patent: August 22, 2017Assignee: UNITED MICROELECTRONICS CORP.Inventors: Shih-Yin Hsiao, Ching-Chung Yang, Ping-Hung Chiang, Nien-Chung Li, Wen-Fang Lee, Chih-Chung Wang, Kuan-Liang Liu, Kai-Kuen Chang