Abstract: An optical system comprises a number of optics modules, wherein the respective optics module comprises: a number of displaceable optical elements for guiding radiation in the optical system; a number of actuator/sensor devices, wherein at least one of the actuator/sensor devices is assigned to the respective optical element, wherein the respective actuator/sensor device is configured to displace the assigned optical element and/or to acquire a position of the assigned optical element; a vacuum-tight housing; and an electronics unit in the vacuum-tight housing and configured to actuate the respective actuator/sensor device on the basis of received actuation data, wherein the electronics unit has a first electronics region containing a number of electrical and/or electronic component parts and that generates, and a second electronics region containing a number of electrical and/or electronic component parts.

Abstract: An optical system comprises: a plurality of optical components for guiding radiation in the optical system; a plurality of assemblies, each assembly comprising at least one actuator/sensor device assigned to one of the optical components; and a number of actuating units for actuating the plurality of assemblies. Each actuating unit is assigned at least two of the assemblies. An interface is provided for electrically coupling the respective actuating unit to the assemblies assigned to the actuating unit to transmit respective electrical signals between the actuating unit and the respective assemblies assigned to the actuating unit. The respective electrical signals comprise a data signal and/or electrical energy for operating the respective assembly. The interface for each assembly assigned to the actuating unit has a respective bundle of electrical cables.

Abstract: The invention relates to the provision of a suitable interior for a near-atmospheric-pressure operating mode and a vacuum-pressure operating mode of an entrance portion of a material analysis system. The entrance portion comprises a housing which is designed for vacuum pressure and for near-atmospheric pressure and which has an interior that can be provided according to an operating mode of the material analysis system, which interior is designed to receive, at its distal end via an entrance opening, charged particles released by a sample.

Abstract: The invention relates to pumping liquids (18) in a vacuum system at a negative pressure, in particular at an absolute pressure of below 600 mbar. For this purpose, a manipulator head (10?) is provided for use in a vacuum housing at a negative pressure. The manipulator head (10?) contains a liquid cell (12) and a liquid pump (14). The liquid cell (12) has a liquid cell outlet (22) and an interior space (16) that is designed for negative pressure and designed to receive a liquid (18). The liquid pump (14) has a liquid pumping region (26) which is fluidically connected to the fluid cell outlet (22) and is designed to pump the liquid (18) out of the liquid pumping region (26) when there is negative pressure in the interior space (16) of the liquid cell (12).

Abstract: An optical system comprises a number of optics modules, wherein the respective optics module comprises: a number of displaceable optical elements for guiding radiation in the optical system; a number of actuator/sensor devices, wherein at least one of the actuator/sensor devices is assigned to the respective optical element, wherein the respective actuator/sensor device is configured to displace the assigned optical element and/or to acquire a position of the assigned optical element; a vacuum-tight housing; and an electronics unit in the vacuum-tight housing and configured to actuate the respective actuator/sensor device on the basis of received actuation data, wherein the electronics unit has a first electronics region containing a number of electrical and/or electronic component parts and that generates, and a second electronics region containing a number of electrical and/or electronic component parts.

Abstract: A lithography optical system comprises: actuatable individual mirrors; a vacuum-tight housing; and an electronics arrangement integrated in the vacuum-tight housing and configured for individual actuation of each individual mirror. The electronics arrangement has a plurality of electronics modules releasably installed in the vacuum-tight housing and which each have a plurality of interconnected electronic and/or electrical components. A specific electronic module has a PCB, on which the electronic and/or electrical components of the specific electronics module are arranged. The PCB is arranged on a frame of the specific electronics module. The frame has a fastening section to releasably install the specific electronics module in the vacuum-tight housing and/or to connect the specific electronics module to a further electronics module of the electronics arrangement.

Abstract: An optical system comprises: a plurality of optical components for guiding radiation in the optical system; a plurality of assemblies, each assembly comprising at least one actuator/sensor device assigned to one of the optical components; and a number of actuating units for actuating the plurality of assemblies. Each actuating unit is assigned at least two of the assemblies. An interface is provided for electrically coupling the respective actuating unit to the assemblies assigned to the actuating unit to transmit respective electrical signals between the actuating unit and the respective assemblies assigned to the actuating unit. The respective electrical signals comprise a data signal and/or electrical energy for operating the respective assembly. The interface for each assembly assigned to the actuating unit has a respective bundle of electrical cables.

Abstract: An actuator-sensor device for an optics module of a lithography apparatus comprises: an actuator-sensor unit having an actuator and a sensor; a control unit electrically connected to the actuator-sensor unit; and a support element which on a first supporting side of same supports the actuator-sensor unit and which on a second supporting side of same supports the control unit, with the second supporting side being opposite to the first supporting side.

Abstract: An orientation-determining system determines a person's compass orientation from data generated by one or more sensors embedded within a portable device transported by the person. In some scenarios, the system uses the person's initial orientation to calculate an initial orientation delta describing a difference between the person's initial orientation and an initial orientation of the device. In other scenarios, the system calculates the person's current orientation based on an initial orientation of the device and a known or assumed orientation delta. The system can apply the orientation delta to the device's current orientation to determine the person's current orientation. The system can update the orientation delta based on any changes to the orientation of the person or the device.

Abstract: Apparatus and methods are provided for determining a person's compass orientation from data generated by one or more sensors embedded within a portable device transported by the person. Such sensors may include an accelerometer, a GPS (Global Positioning System) receiver, a magnetometer (e.g., a compass), a barometer, etc. In some scenarios (e.g., when the person is walking), the person's initial orientation is directly determined and is used to calculate an initial orientation delta describing a difference between the person's initial orientation and an initial orientation of the device. In other scenarios, the person's current orientation is calculated based on an initial orientation of the device and a known or assumed orientation delta. Later in time, the orientation delta can be applied to the device's current orientation to determine the person's current orientation. As events involving the person and/or the device are observed, an orientation delta may be updated.