Abstract: In semiconductor manufacturing, deionized (DI) water or another process fluid is flowed through a nonmetallic pipe and onto a semiconductor wafer. Static electric charge is discharged from the DI water or other process fluid flowing through the nonmetallic pipe via an electrically conductive material disposed on an outside of the nonmetallic pipe. The electrically conductive material disposed on the outside of the nonmetallic pipe is electrically grounded. The nonmetallic pipe may comprise fluoropolymer (PFA) based tubing. In some embodiments, the nonmetallic pipe includes: a PFA-NE pipe connected with a chamber or housing containing the wafer, and a second pipe connected with the PFA-NE pipe by a pipe connector, in which the second pipe is more electrically insulating than the PFA-NE pipe.

Abstract: In semiconductor manufacturing, deionized (DI) water or another process fluid is flowed through a nonmetallic pipe and onto a semiconductor wafer. Static electric charge is discharged from the DI water or other process fluid flowing through the nonmetallic pipe via an electrically conductive material disposed on an outside of the nonmetallic pipe. The electrically conductive material disposed on the outside of the nonmetallic pipe is electrically grounded. The nonmetallic pipe may comprise fluoropolymer (PFA) based tubing. In some embodiments, the nonmetallic pipe includes: a PFA-NE pipe connected with a chamber or housing containing the wafer, and a second pipe connected with the PFA-NE pipe by a pipe connector, in which the second pipe is more electrically insulating than the PFA-NE pipe.

Abstract: A sensing system is provided. The system includes an electronic device and a detachable sensor. The detachable sensor could be connected to the electronic device through a connecting interface. When the electronic device detects that the detachable sensor is connected to the electronic device, the electronic device obtains a plurality of sensing data, and transforms the sensing data into a plurality of sensing results. Also, when the electronic device is connected to a host device, the electronic device sends the sensing results to the host device.

Abstract: A sensing system is provided. The system includes an electronic device and a detachable sensor. The detachable sensor could be connected to the electronic device through a connecting interface. When the electronic device detects that the detachable sensor is connected to the electronic device, the electronic device obtains a plurality of sensing data, and transforms the sensing data into a plurality of sensing results. Also, when the electronic device is connected to a host device, the electronic device sends the sensing results to the host device.