Abstract: Image producing ellipsometric measuring process, in which a plurality of individual images, which respectively represent at least one part of an object, are sequentially recorded by means of an image producing detector with varying ellipsometrically relevant recording parameters (102, 108), are stored at least temporarily in a digital memory, and are at least sectionally combined with each other by computation according to pre-set rules for production of an output image or value (126), thereby characterized, that in a reference image a region of interest (ROI) is defined on the basis of image information parameters and its position and/or shape in a first individual image is determined (104), in a second individual image the position and/or shape of the ROI is determined (112) on the basis of the same image information parameters, the second individual image is corrected (122) by translation, rotation, compression and/or stretching at least sectionally in the manner, that the position and/or shape of the