Abstract: Provided are a pressure difference sensor, and a manufacturing method and an application thereof. A manner of bonding three layers of wafers is adopted, and the sensor includes an upper structure, an intermediate structure and a lower structure. Each of the upper structure and the intermediate structure is manufactured by a silicon-on-insulator (SOI) wafer, the lower structure is manufactured by patterned doped intrinsic silicon; and a lead pad of each of the upper electrode, and the intermediate electrode and the lower electrode is located on a corresponding one of three-stepped steps at a side of the pressure difference sensor. Annular through holes are formed around the upper electrode and the lower electrode. A constant capacitance of a capacitance signal outputted by an upper capacitor of the sensor by extending an electric field line path of the constant capacitor part.

Abstract: Provided are a pressure difference sensor, and a manufacturing method and an application thereof. A manner of bonding three layers of wafers is adopted, and the sensor includes an upper structure, an intermediate structure and a lower structure. Each of the upper structure and the intermediate structure is manufactured by a silicon-on-insulator (SOI) wafer, the lower structure is manufactured by patterned doped intrinsic silicon; and a lead pad of each of the upper electrode, and the intermediate electrode and the lower electrode is located on a corresponding one of three-stepped steps at a side of the pressure difference sensor. Annular through holes are formed around the upper electrode and the lower electrode. A constant capacitance of a capacitance signal outputted by an upper capacitor of the sensor by extending an electric field line path of the constant capacitor part.

Abstract: Disclosed is an ultra-micro voice coil motor based on Micro-Electro-Mechanical System (MEMS) three-dimensional coil. The ultra-micro voice coil motor based on MEMS three-dimensional coil comprises a yoke, where an accommodating cavity is formed in the yoke, and a tongue is arranged in the accommodating cavity of the yoke; and two permanent magnets symmetrically arranged at a top and a bottom of the accommodating cavity; the three-dimensional coil is provided with an iron core slot, and the tongue of the yoke passes through the iron core slot to be in clearance fit with the three-dimensional coil; one end of the yoke is provided with a baffle, same poles of two magnets face each other, and a stator of the voice coil motor is the three-dimensional coil or the yoke and the permanent magnets.