Abstract: A coating apparatus, a method of recycling a coating liquid by utilization of the same and a method for cleaning the same are provided. The coating apparatus includes a supply device, a coater device and a recycling device. The supply device includes a liquid inlet, a liquid outlet and a coating liquid supply unit connected with the liquid inlet. The coater device includes a coating liquid nozzle including a receiving opening connected with the liquid outlet of the supply device, a coating opening and an exhaust opening. The recycling device includes a recycled liquid outlet and at least one recycling inlet including a supply process recycling inlet which is connected with the exhaust opening of the coating liquid nozzle, and the recycled liquid outlet is connected with the liquid inlet of the supply device.

Abstract: The present invention provides a liquid supplying device and a photoresist coating equipment. The liquid supplying device i A liquid supplying device, comprising: a tank for storing liquid; and a liquid transfer pipe inserted into the tank, and an elastic retractable structure is provided on at least one portion of the liquid transfer pipe, and a pipe end portion of the liquid transfer pipe in the tank is always contacted with and pressed against an inner wall of the tank. In the present invention, the liquid is able to be output continuously, and a problem of the prior art in which the liquid stored in the tank cannot be used sufficiently can be avoided.

Abstract: A coating apparatus, a method of recycling a coating liquid by utilization of the same and a method for cleaning the same are provided. The coating apparatus includes a supply device, a coater device and a recycling device. The supply device includes a liquid inlet, a liquid outlet and a coating liquid supply unit connected with the liquid inlet. The coater device includes a coating liquid nozzle including a receiving opening connected with the liquid outlet of the supply device, a coating opening and an exhaust opening. The recycling device includes a recycled liquid outlet and at least one recycling inlet including a supply process recycling inlet which is connected with the exhaust opening of the coating liquid nozzle, and the recycled liquid outlet is connected with the liquid inlet of the supply device.

Abstract: A vacuum pipeline system is provided. The vacuum pipeline system includes a dry pump and a vacuum dry chamber, a first valve and a second valve, and an air open system. The dry pump is connected to the vacuum dry chamber through a vacuum pipeline. The first valve and the second valve are disposed on the vacuum pipeline. The air open system is for injecting air into the vacuum pipeline, and is disposed on the vacuum pipeline and between the first valve and second valve.

Abstract: The present invention provides a liquid supplying device and a photoresist coating equipment. The liquid supplying device i A liquid supplying device, comprising: a tank for storing liquid; and a liquid transfer pipe inserted into the tank, and an elastic retractable structure is provided on at least one portion of the liquid transfer pipe, and a pipe end portion of the liquid transfer pipe in the tank is always contacted with and pressed against an inner wall of the tank. In the present invention, the liquid is able to be output continuously, and a problem of the prior art in which the liquid stored in the tank cannot be used sufficiently can be avoided.