Abstract: An inspection apparatus includes a limiting unit that is provided between a light source and a target region and limits light traveling from the light source toward the target region, and an imaging unit that captures an image using light passing through the limiting unit, reflected from the target region, and incident on the imaging unit. The limiting unit allows light, which travels in one direction and is incident on the imaging unit in a case where the light is specularly reflected from the target region, to pass and allows at least a part of light, which travels in other directions, not to pass, among light emitted from the light source.

Abstract: A surface inspection apparatus includes an imaging device configured to image a surface of an object to be inspected, and a processor configured to: calculate a numerical value representing a quality of the surface by processing an image captured by the imaging device, and receive a change in a range used to calculate the numerical value indicated by an index in the image.

Abstract: A surface inspection apparatus includes an imaging device configured to image a surface of an object to be inspected, and a processor configured to: calculate a numerical value representing a quality of the surface by processing an image captured by the imaging device, and notify a user of information indicating a relationship between a first orientation of a pattern on the surface detected from the image and a second orientation that gives a direction of imaging in which a sensitivity of detection by the imaging device is high.

Abstract: The disclosure provides a surface inspection apparatus for inspecting a surface of an object, a non-transitory computer readable medium thereof, and a surface inspection method thereof. According to an aspect of the disclosure, the surface inspection apparatus includes an imaging device configured to image a surface of an object to be inspected, and a processor configured to calculate a numerical value representing a quality of the surface by processing an image captured by the imaging device, and display, on a display device, the image including an index for specifying a position of a portion that has contributed to the calculation of the numerical value and the numerical value.

Abstract: A surface inspection apparatus includes an imaging device that images a surface of an object to be inspected, and a processor configured to: calculate an evaluation value of a texture of the object through processing of an image imaged by the imaging device; and detect reflection of a cause of erroneous calculation of the image within a specific range based on at least brightness information of the image.

Abstract: A surface inspection apparatus includes an imaging device configured to image a surface of an object to be inspected, and a processor configured to calculate a numerical value representing a quality of the surface by processing an image captured by the imaging device, and display, on a display device, the image including an index for specifying a position of a portion that has contributed to the calculation of the numerical value and the numerical value.

Abstract: A surface inspection apparatus includes an imaging device configured to image a surface of an object to be inspected, and a processor configured to: calculate a numerical value representing a quality of the surface by processing an image captured by the imaging device, and receive a change in a range used to calculate the numerical value indicated by an index in the image.

Abstract: A surface inspection apparatus includes an imaging device configured to image a surface of an object to be inspected, and a processor configured to: calculate a numerical value representing a quality of the surface by processing an image captured by the imaging device, and notify a user of information indicating a relationship between a first orientation of a pattern on the surface detected from the image and a second orientation that gives a direction of imaging in which a sensitivity of detection by the imaging device is high.

Abstract: A surface inspection apparatus includes an imaging device that images a portion of an object to be inspected, a first light source that is included in multiple light sources that illuminate the portion and that is configured such that a light component that is included in light emitted from the first light source and that is reflected by specular reflection from the portion to be inspected is a principal light component that is incident on the imaging device, and a second light source that is included in the multiple light sources and that is disposed opposite the first light source with an optical axis of the imaging device interposed therebetween such that a light component that is reflected by diffuse reflection from the portion to be inspected is a principal light component that is incident on the imaging device.