Abstract: Semiconductor structures are provided with five different cooling elements directly bonded to a semiconductor chip. The cooling element is directly bonded to the backside of a thinned semiconductor substrate or to the front side back-end-of-line (BEOL) interconnect wiring of the semiconductor chip. The cooling element replaces a carrier wafer on semiconductor chips with backside BEOL interconnect wiring. Each of the five cooling elements provide better thermal conductivity for the semiconductor structure when directly bonded to the front side BEOL interconnect wiring than the carrier wafer typically bonded to a semiconductor chip with backside BEOL interconnect wiring. The cooling element is one of a copper cooling element with water-filled microchannels, or a copper plate, a silicon cooling element with water-filled microchannels, a silicon carbide plate, or a glass plate with copper-filled vias. The cooling element is directly bonded to the semiconductor chip by a hybrid bond.