Patents by Inventor Kalyan Kumar MANKALA

Kalyan Kumar MANKALA has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Lithographic apparatus and illumination uniformity correction system
    Patent number: 11656555
    Abstract: An illumination adjustment apparatus, to adjust a cross slot illumination of a beam in a lithographic apparatus, includes a plurality of fingers to adjust the cross slot illumination to conform to a selected intensity profile. Each finger has a distal edge that includes at least two segments. The two segments form an indentation of the distal edge.
    Type: Grant
    Filed: April 14, 2020
    Date of Patent: May 23, 2023
    Assignees: ASML HOLDING N.V., ASML NETHERLANDS B V
    Inventors: Janardan Nath, Kalyan Kumar Mankala, Todd R. Downey, Joseph Harry Lyons, Ozer Unluhisarcikli, Alexander Harris Ledbetter, Nicholas Stephen Apone, Tian Gang
  • LITHOGRAPHIC APPARATUS AND ILLUMINATION UNIFORMITY CORRECTION SYSTEM
    Publication number: 20220214622
    Abstract: An illumination adjustment apparatus, to adjust a cross slot illumination of a beam in a lithographic apparatus, includes a plurality of fingers to adjust the cross slot illumination to conform to a selected intensity profile. Each finger has a distal edge that includes at least two segments. The two segments form an indentation of the distal edge.
    Type: Application
    Filed: April 14, 2020
    Publication date: July 7, 2022
    Applicants: ASML HOLDING N.V., ASML NETHERLANDS B.V.
    Inventors: Janardan NATH, Kalyan Kumar MANKALA, Todd R. DOWNEY, Joseph Harry LYONS, Ozer UNLUHISARCIKLI, Alexander Harris LEDBETTER, Nicholas Stephen APONE, Tian GANG
  • Linear motor magnetic shield apparatus for lithographic systems
    Patent number: 9136751
    Abstract: A magnetic shield having non-magnetic gaps provides reduced magnetic cross-talk for a linear motor array in a precision positioning system. Redirecting the leakage flux limits the cross-talk and associated deleterious effects. Such preferred magnetic circuit paths for the leakage are affixed to the moving magnet system of the linear motor. Embodiments of the preferred flux leakage paths are realized by providing a ferromagnetic shield separated by a non-magnetic gap between the permanent magnets and the back-irons. In another embodiment, the ferromagnetic shield separation includes diamagnetic materials.
    Type: Grant
    Filed: September 14, 2012
    Date of Patent: September 15, 2015
    Assignee: ASML Holding N.V.
    Inventors: Kalyan Kumar Mankala, Roberto Bernardo Wiener, Pradeep Kumar Govil, Andrew Nelson
  • Linear motor magnetic shield apparatus
    Patent number: 9130443
    Abstract: A magnetic shield having non-magnetic gaps provides reduced magnetic cross-talk for a linear motor array in a precision positioning system. Redirecting the leakage flux limits the cross-talk and associated deleterious effects. Such preferred magnetic circuit paths for the leakage are affixed to the moving magnet system of the linear motor. Embodiments of the preferred flux leakage paths are realized by providing a ferromagnetic shield separated by a non-magnetic gap between the permanent magnets and the back-irons. In another embodiment, the ferromagnetic shield separation includes diamagnetic materials.
    Type: Grant
    Filed: November 20, 2009
    Date of Patent: September 8, 2015
    Assignee: ASML Holding N.V.
    Inventors: Kalyan Kumar Mankala, Roberto Bernardo Wiener, Pradeep Kumar Govil, Andrew Nelson
  • Linear Motor Magnetic Shield Apparatus
    Publication number: 20130010273
    Abstract: A magnetic shield having non-magnetic gaps provides reduced magnetic cross-talk for a linear motor array in a precision positioning system. Redirecting the leakage flux limits the cross-talk and associated deleterious effects. Such preferred magnetic circuit paths for the leakage are affixed to the moving magnet system of the linear motor. Embodiments of the preferred flux leakage paths are realized by providing a ferromagnetic shield separated by a non-magnetic gap between the permanent magnets and the back-irons. In another embodiment, the ferromagnetic shield separation includes diamagnetic materials.
    Type: Application
    Filed: September 14, 2012
    Publication date: January 10, 2013
    Applicant: ASML Holding N.V.
    Inventors: Kalyan Kumar MANKALA, Roberto Bernardo WIENER, Pradeep Kumar GOVIL, Andrew NELSON
  • Linear Motor Magnetic Shield Apparatus
    Publication number: 20100165311
    Abstract: A magnetic shield having non-magnetic gaps provides reduced magnetic cross-talk for a linear motor array in a precision positioning system. Redirecting the leakage flux limits the cross-talk and associated deleterious effects. Such preferred magnetic circuit paths for the leakage are affixed to the moving magnet system of the linear motor. Embodiments of the preferred flux leakage paths are realized by providing a ferromagnetic shield separated by a non-magnetic gap between the permanent magnets and the back-irons. In another embodiment, the ferromagnetic shield separation includes diamagnetic materials.
    Type: Application
    Filed: November 20, 2009
    Publication date: July 1, 2010
    Applicant: ASML Holding N.V.
    Inventors: Kalyan Kumar MANKALA, Roberto Bernardo Wiener, Pradeep Kumar Govil, Andrew Nelson