Patents by Inventor Kamal AVALA

Kamal AVALA has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Method for processing a semiconductor wafer using a thin edge carrier ring
    Patent number: 10720323
    Abstract: A method for processing a semiconductor wafer in a PECVD deposition chamber with a circular pedestal and a recessed portion formed around the outer top surface of the pedestal. The method may include using a circular wafer carrier ring with a recessed portion.
    Type: Grant
    Filed: January 8, 2016
    Date of Patent: July 21, 2020
    Assignee: TEXAS INSTRUMENTS INCORPORATED
    Inventors: Jian Song, Ruben Anthony Pesina, Kamal Avala
  • Method for Processing a Semiconductor Wafer Using a Thin Edge Carrier Ring
    Publication number: 20160126090
    Abstract: A method for processing a semiconductor wafer in a PECVD deposition chamber with a circular pedestal and a recessed portion formed around the outer top surface of the pedestal. The method may include using a circular wafer carrier ring with a recessed portion.
    Type: Application
    Filed: January 8, 2016
    Publication date: May 5, 2016
    Inventors: Jian Song, Ruben Anthony Pesina, Kamal Avala
  • THIN EDGE CARRIER RING
    Publication number: 20110297088
    Abstract: A PECVD deposition chamber with a circular pedestal with a recessed portion in the outer top surface of the pedestal. A PECVD deposition chamber with a circular wafer carrier ring with a recessed portion in the outer top surface of the wafer carrier ring.
    Type: Application
    Filed: June 6, 2011
    Publication date: December 8, 2011
    Applicant: TEXAS INSTRUMENTS INCORPORATED
    Inventors: Jian SONG, Ruben Anthony PESINA, Kamal AVALA