Patents by Inventor Kamatchigobinath Manoharan

Kamatchigobinath Manoharan has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Multicathode deposition system
    Patent number: 11387085
    Abstract: A physical vapor deposition (PVD) chamber and a method of operation thereof are disclosed. Chambers and methods are described that provide a chamber comprising one or more of contours that reduce particle defects, temperature control and or measurement and and/or voltage particle traps to reduce processing defects.
    Type: Grant
    Filed: August 9, 2019
    Date of Patent: July 12, 2022
    Assignee: Applied Materials Inc.
    Inventors: Sanjay Bhat, Vibhu Jindal, Kamatchigobinath Manoharan
  • Multicathode Deposition System
    Publication number: 20200051797
    Abstract: A physical vapor deposition (PVD) chamber and a method of operation thereof are disclosed. Chambers and methods are described that provide a chamber comprising one or more of contours that reduce particle defects, temperature control and or measurement and and/or voltage particle traps to reduce processing defects.
    Type: Application
    Filed: August 9, 2019
    Publication date: February 13, 2020
    Inventors: Sanjay Bhat, Vibhu Jindal, Kamatchigobinath Manoharan