Patents by Inventor Kameshwar Polla

Kameshwar Polla has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Sensor geometry correction methods and apparatus
    Patent number: 6741945
    Abstract: Described are methods and apparatus for collecting measured parameter data for applications such as deriving response models and information required for developing and maintaining processes and process tools. The methods and apparatus are capable of deriving correction factors for the measured data and applying the corrections factors to the measure data so as to provide corrected parameter data having increased accuracy. One embodiment uses warpage geometry to derive the correction factors.
    Type: Grant
    Filed: April 19, 2002
    Date of Patent: May 25, 2004
    Assignee: OnWafer Technologies, Inc.
    Inventors: Kameshwar Polla, Costas J. Spanos
  • Data collection and correction methods and apparatus
    Patent number: 6738722
    Abstract: Described are methods and apparatus for collecting measured parameter data for applications such as deriving response models and information required for developing and maintaining processes and process tools. The methods and apparatus are capable of deriving correction factors for the measured data and applying the corrections factors to the measured data so as to provide corrected parameter data having increased accuracy.
    Type: Grant
    Filed: April 19, 2002
    Date of Patent: May 18, 2004
    Assignee: OnWafer Technologies, Inc.
    Inventors: Kameshwar Polla, Costas J. Spanos
  • Data collection and correction methods and apparatus
    Publication number: 20020177917
    Abstract: Described are methods and apparatus for collecting measured parameter data for applications such as deriving response models and information required for developing and maintaining processes and process tools. The methods and apparatus are capable of deriving correction factors for the measured data and applying the corrections factors to the measured data so as to provide corrected parameter data having increased accuracy.
    Type: Application
    Filed: April 19, 2002
    Publication date: November 28, 2002
    Inventors: Kameshwar Polla, Costas J. Spanos