Patents by Inventor Kan DU

Kan DU has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • CONTROLLING ABERRATION IN AN OPTICAL SYSTEM, A METROLOGY SYSTEM, LITHOGRAPHIC APPARATUS, AND METHODS THEREOF
    Publication number: 20240201486
    Abstract: A method includes determining optical aberrations of an optical system, identifying an illumination profile that compensates for the optical aberrations of the optical system, and curing a layer of optical cement of an optical device using a modulated energy beam to achieve the identified illumination profile.
    Type: Application
    Filed: March 31, 2022
    Publication date: June 20, 2024
    Applicant: ASML Netherlands B.V.
    Inventors: Krishanu SHOME, Scott Douglas COSTON, Kan DU