Abstract: A slide table includes an inner member, an outer member fitted at least partly over the inner member, air bearings provided between the inner and outer members, and a motor means having a coil connected to the outer member to drive the same.

Abstract: A gain of a variable gain amplifier circuit is controlled by applying a signal of a predetermined voltage level to the variable gain amplifier circuit during an idle period of an ultrasonic receiving signal, deriving an output from the variable gain amplifier circuit, comparing it with a voltage level obtained as an aimed value by a gain regulator or other control circuit of an ultrasonic signal amplifier circuit including the variable gain amplifier circuit and producing a gain control signal according to a difference resulting from the comparison to control the gain to the aimed value until the difference becomes zero. The gain of the variable gain amplifier circuit set in the idle period is maintained during a measurement period of a subsequent receiving signal so that the latter is amplified with the maintained gain. Thus, a stepwise and selective gain setting corresponding to the aimed value can be obtained by controlling the gain of the variable gain amplifier according to the aimed value.