Abstract: A multiwavelength imaging and spectroscopic photoemission microscope system (100) which simultaneously provides images in a broad range of the electromagnetic spectrum, such as between 200 nm-1000 nm (optical or visible light) and 1000 nm-500 nm (infrared light). The multiwavelength imaging and spectroscopic photoemission microscope system comprises a microscope (102), a spectrometer (106), a beam splitter (108), a first spectrum focal plane array (110) including an appropriate photodiode (114A), a second spectrum focal plane array (120) including an appropriate photodiode (114B), and a cryogenic vessel (160) to maintain relevant portions of the system at a very low temperature. The invention may be used in failure analysis of integrated circuits and in semiconductor and low temperature physics.

Abstract: A method for measuring thermal differences in infrared emissions from semiconductors, the method utilizing an image sensor including an array detector having a plurality of detector elements which produce signals corresponding to semiconductor radiation emission focused thereupon by an optical lens system. At least one bandpass filter is utilized to substantially filter that portion of the semiconductor radiation emission having wavelengths greater than 5 micrometers. The detector element signals are processed to identify performance degrading phenomena occurring in the semiconductor device.