Patents by Inventor Kaneko Kazuaki

Kaneko Kazuaki has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • SUBSTRATE HOLDER AND SUBSTRATE TEMPERATURE CONTROL METHOD
    Publication number: 20110068084
    Abstract: A substrate holder which has an electrostatic chuck on a substrate holding side of a holder main body and electrostatically adsorbs a substrate includes: a heating unit which is built in the electrostatic chuck and heats the substrate; a circulation medium distribution path which is formed inside the holder main body and connected to a circulation medium supplying unit which circulates and supplies a circulation medium; a heat transference varying unit which is formed by sealing a heat transfer gas in a gap between the holder main body and the electrostatic chuck and connected to a heat transfer gas supply system which can control a sealing pressure; and a gas sealing unit which is formed by sealing a heat transfer gas in a gap between the electrostatic chuck and the substrate and connected to the heating transfer gas supply system.
    Type: Application
    Filed: October 13, 2010
    Publication date: March 24, 2011
    Applicant: CANON ANELVA CORPORATION
    Inventors: Yoshida Tatsuhiko, Kaneko Kazuaki, Tanaka Yoh
  • SUBSTRATE HOLDER
    Publication number: 20100014208
    Abstract: A substrate holder which has an electrostatic chuck on a substrate holding side of a holder main body and electrostatically adsorbs a substrate includes: a heating unit which is built in the electrostatic chuck and heats the substrate; a circulation medium distribution path which is formed inside the holder main body and connected to a circulation medium supplying unit which circulates and supplies a circulation medium; a heat transference varying unit which is formed by sealing a heat transfer gas in a gap between the holder main body and the electrostatic chuck and connected to a heat transfer gas supply system which can control a sealing pressure; and a gas sealing unit which is formed by sealing a heat transfer gas in a gap between the electrostatic chuck and the substrate and connected to the heating transfer gas supply system.
    Type: Application
    Filed: June 30, 2009
    Publication date: January 21, 2010
    Applicant: CANON ANLEVA CORPORATION
    Inventors: Yoshida Tatsuhiko, Kaneko Kazuaki, Tanaka Yoh