Patents by Inventor Kang-Il Heo

Kang-Il Heo has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Publication number: 20100104403
    Abstract: An apparatus for transferring a wafer includes a ceramic blade, an electrode, a plurality of pads, a coating layer and a robot arm. The blade supports the wafer, and the electrode is disposed inside the blade. Electric power is applied to the electrode to generate an electrostatic force for holding the wafer. The pads are disposed on an upper surface of the blade, and thus frictional forces may be provided between the wafer and the pads. The coating layer is disposed on the blade. The robot arm is connected with the blade to move the blade.
    Type: Application
    Filed: March 3, 2008
    Publication date: April 29, 2010
    Inventors: Sang-Bum Cho, Kang-Il Heo, Byoung-Jin Jung, Sung-Don Ahn, Jung-Ho Choi, Seung-Hee Gang, Hwi-Souck Chang