Abstract: The present disclosure relates to a fabrication method of a photomask. The method of fabricating a photomask provides for a layout of patterns to be designed. The layout of patterns may be formed on a wafer on which chips are formed. The layout of patterns are corrected to provide a layout of a photoresist pattern serving as an etching mask for forming the patterns on the wafer while generating a flare map of the patterns. An optical proximity correction (OPC) may be performed at a chip level on the corrected layout of patterns to perform a secondary correction of the layout of patterns. A second OPC may be performed at a level of a shot which includes a plurality of ones of the chips by reflecting the flare map on the second corrected layout of patterns to a third corrected layout of patterns.

Abstract: An optical proximity correction method of a lithography system includes dividing a transmission cross coefficient (TCC) for each slit region; generating an optical proximity correction (OPC) model to which the divided TCC is applied; measuring an apodization value for each slit position; fitting critical dimension (CD) data for each slit position to a simulation CD of the OPC model; and correcting the OPC model using the fitted CD data.

Abstract: The present disclosure relates to a fabrication method of a photomask. The method of fabricating a photomask provides for a layout of patterns to be designed. The layout of patterns may be formed on a wafer on which chips are formed. The layout of patterns are corrected to provide a layout of a photoresist pattern serving as an etching mask for forming the patterns on the wafer while generating a flare map of the patterns. An optical proximity correction (OPC) may be performed at a chip level on the corrected layout of patterns to perform a secondary correction of the layout of patterns. A second OPC may be performed at a level of a shot which includes a plurality of ones of the chips by reflecting the flare map on the second corrected layout of patterns to a third corrected layout of patterns.

Abstract: Provided is a method of fabricating a thermal conductive polymer, including: a) fabricating a gel filament by primarily elongating a solution filament formed by spinning a mixed solution containing an ultra high molecular weight polyolefin (UHMWPO) resin and a first solvent, followed by cooling; b) secondarily elongating the gel filament; c) fabricating a dry filament by removing the solvent from the gel filament, followed by tertiary elongation; and d) converting the dry filament into the gel filament by adding the first solvent to the dry filament; e) removing the first solvent from the converted gel filament; and f) quaternarily elongating the gel filament from which the first solvent is removed.

Abstract: Provided is a method of fabricating a thermal conductive polymer, including: a) fabricating a gel filament by primarily elongating a solution filament formed by spinning a mixed solution containing an ultra high molecular weight polyolefin (UHMWPO) resin and a first solvent, followed by cooling; b) secondarily elongating the gel filament; c) fabricating a dry filament by removing the solvent from the gel filament, followed by tertiary elongation; and d) converting the dry filament into the gel filament by adding the first solvent to the dry filament; e) removing the first solvent from the converted gel filament; and f) quaternarily elongating the gel filament from which the first solvent is removed.

Abstract: The present invention is directed to a polyalkylene carbonate resin composition for producing a decorating material and an environment-friendly polyalkylene carbonate resin decorating material produced therefrom. More particularly, the invention is directed to polyalkylene carbonate resin composition for producing a decorating material in which including a polymer additive to impart heat resistance and shape stability to the decorating material, a crosslinker and a chain extender to improve the processability at the processing temperature, and a flame retardant agent to impart a flame retardant effect, and an environment-friendly polyalkylene carbonate resin decorating material produced therefrom. The environment-friendly polyalkylene carbonate resin decorating material produced using the inventive composition has excellent thermal stability, processability, and dimensional stability.

Abstract: Provided is a resin composition for a sheet to an eco-friendly poly(alkylene carbonate) resin composition containing a poly(alkylene carbonate) resin developed by efficiently utilizing carbon dioxide, which is a major contributor to global warming, as a main material, and including an strength controller, a flexibilizer and a filler. The present invention can solve problems related to environment harmfulness of the existing polyvinyl chloride resin products and have excellent flameproofing property and stretching property. In addition, the present invention can employ a calender processing method, which allows mass production and overcome a small production type extrusion processing method, which is regarded as the biggest disadvantage of thermoplastics emerging as alternatives for the existing polyvinyl chloride products.

Abstract: Provided is a polyalkylene carbonate resin composition for producing a decorating material and an environment-friendly polyalkylene carbonate resin decorating material produced therefrom, and more particularly to polyalkylene carbonate resin composition for producing a decorating material in which a polymer additive is input to impart heat resistance and shape stability of the decorating material, a crosslinker and a chain extender is input to improve the processability at a processing temperature, and a flame retardant agent is added to impart a flame retardant effect, and an environment-friendly polyalkylene carbonate resin decorating material produced therefrom. An environment-friendly polyalkylene carbonate resin decorating material having excellent thermal stability, processability, and dimensional stability can be produced by using the composition according to the present invention.

Abstract: Provided is a resin composition for a sheet to an eco-friendly poly(alkylene carbonate) resin composition containing a poly(alkylene carbonate) resin developed by efficiently utilizing carbon dioxide, which is a major contributor to global warming, as a main material, and including an strength controller, a flexibilizer and a filler. The present invention can solve problems related to environment harmfulness of the existing polyvinyl chloride resin products and have excellent flameproofing property and stretching property. In addition, the present invention can employ a calender processing method, which allows mass production and overcome a small production type extrusion processing method, which is regarded as the biggest disadvantage of thermoplastics emerging as alternatives for the existing polyvinyl chloride products.