Patents by Inventor Kangrae Ha

Kangrae Ha has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Support unit and substrate treating device including the same
    Patent number: 9623503
    Abstract: Provided is a method of manufacturing a support unit that supports a substrate. The method includes: providing a support plate formed of a non-conductive material and supporting a substrate; providing a base plate disposed below the support plate and formed of a material including a conductive material; and depositing a metallic layer at a bottom of the support plate and coupling the metallic layer and the base plate through brazing.
    Type: Grant
    Filed: October 29, 2014
    Date of Patent: April 18, 2017
    Assignee: SEMES CO., LTD.
    Inventors: Wonhaeng Lee, Kangrae Ha
  • SUPPORT UNIT AND SUBSTRATE TREATING DEVICE INCLUDING THE SAME
    Publication number: 20150116689
    Abstract: Provided is a method of manufacturing a support unit that supports a substrate. The method includes: providing a support plate formed of a non-conductive material and supporting a substrate; providing a base plate disposed below the support plate and formed of a material including a conductive material; and depositing a metallic layer at a bottom of the support plate and coupling the metallic layer and the base plate through brazing.
    Type: Application
    Filed: October 29, 2014
    Publication date: April 30, 2015
    Applicant: SEMES CO., LTD.
    Inventors: Wonhaeng Lee, Kangrae Ha