Abstract: A system for a semiconductor fabrication facility includes a manufacturing tool including a load port, a maintenance crane, a rectangular zone overlapping with the load port of the manufacturing tool, a plurality of first sensors at corners of the rectangular zone, an OHT vehicle, a second sensor on the OHT vehicle, a third sensor on the load port, and a control unit. The first sensors are configured to detect a location of the maintenance crane and to generate a first location data. The second sensor is configured to generate a second location data. The control unit is configured to receive the first location data of the maintenance crane and the second location data of the OHT vehicle. The control unit further sends signals to the second sensor and the third sensor or to cut off the signal to the second sensor.

Abstract: Described is a low power system for mobile devices that provides continuous, behavior-based security validation of mobile device applications using neuromorphic hardware. A mobile device comprises a neuromorphic hardware component that runs on the mobile device for continuously monitoring time series related to individual mobile device application behaviors, detecting and classifying pattern anomalies associated with a known malware threat in the time series related to individual mobile device application behaviors, and generating an alert related to the known malware threat. The mobile device identifies pattern anomalies in dependency relationships of mobile device inter-application and intra-applications communications, detects pattern anomalies associated with new malware threats, and isolates a mobile device application having a risk of malware above a predetermined threshold relative to a risk management policy.

Abstract: An EUV collector mirror for an extreme ultra violet (EUV) radiation source apparatus includes an EUV collector mirror body on which a reflective layer as a reflective surface is disposed, a heater attached to or embedded in the EUV collector mirror body and a drain structure to drain melted metal from the reflective surface of the EUV collector mirror body to a back side of the EUV collector mirror body.

Abstract: A system for a semiconductor fabrication facility includes a manufacturing tool including a load port, a maintenance tool including a first track and at least one maintenance crane on the first track, a rectangular zone overlapping with the load port, a plurality of first sensors on the first track and at corners of the rectangular zone configured to detect a location of the maintenance crane and generate a first location date, a transporting tool including a second track and a OHT vehicle on the second track, at least a second sensor on the OHT vehicle and configured to generate a second location data, at least a third sensor on the load port, and a control unit configured to receive the first location data and the second location data, and send signals to the second sensor and the third sensor or to cut off the signal to the second sensor.

Abstract: Debris is removed from a collector of an extreme ultraviolet light source vessel by applying a suction force through a vacuum opening of a cable. The method for removing debris also includes weakening debris attachment by using a sticky surface or by spreading a solution through a nozzle, wherein the sticky surface and the nozzle are arranged on the cable proximal to the vacuum opening. A borescope system and interchangeable rigid portions of the cable assists in targeting a target area of the collector where the debris is.

Abstract: An EUV collector mirror for an extreme ultra violet (EUV) radiation source apparatus includes an EUV collector mirror body on which a reflective layer as a reflective surface is disposed, a trajectory correcting device attached to or embedded in the EUV collector mirror body and a trajectory correcting device to adjust the trajectory of metal from the reflective surface of the EUV collector mirror body to an opposite side of the EUV collector mirror body.

Abstract: A Static Random Access Memory (SRAM) cell includes a write port including a first inverter including a first pull-up transistor and a first pull-down transistor, and a second inverter including a second pull-up transistor and a second pull-down transistor and cross-coupled with the first inverter; and a read port including a read pass-gate transistor and a read pull-down transistor serially connected to each. A first doped concentration of impurities doped in channel regions of the second pull-down transistor and the read pull-down transistor is greater than a second doped concentration of the impurities doped in a channel region of the first pull-down transistor, or the impurities are doped in the channel regions of the second pull-down transistor and the read pull-down transistor and are not doped in the channel region of the first pull-down transistor.

Abstract: An extreme ultraviolet (EUV) radiation source apparatus includes a collector and a target droplet generator for generating a tin (Sn) droplet. A debris collection device is disposed over a reflection surface of the collector, and at least one drip hole is located between the debris collection device and the collector. A tin bucket for collecting debris from the debris collection device is located below the at least one drip hole, and a tube or guide rod extends from the drip hole to the tin bucket.

Abstract: Systems and methods according to one or more embodiments are provided for registration of synthetic aperture range profile data to aid in SAR-based navigation. In one example, a SAR-based navigation system includes a memory comprising a plurality of executable instructions. The SAR-based navigation system further includes a processor adapted to receive range profile data associated with observed views of a scene, compare the range profile data to a template range profile data of the scene, and estimate registration parameters associated with the range profile data relative to the template range profile data to determine a deviation from the template range profile data.

Abstract: Debris is removed from a collector of an extreme ultraviolet light source vessel by applying a suction force through a vacuum opening of a cable. The method for removing debris also includes weakening debris attachment by using a sticky surface or by spreading a solution through a nozzle, wherein the sticky surface and the nozzle are arranged on the cable proximal to the vacuum opening. A borescope system and interchangeable rigid portions of the cable assists in targeting a target area of the collector where the debris is.

Abstract: A touch panel includes a substrate, first and second touch sensing electrodes, and first and second traces. The substrate includes a display area and a peripheral area. The first and second touch sensing electrodes are formed on the display area, and the first and second traces are formed on the peripheral area. The first touch sensing electrode is formed by a first portion of a metal nanowire layer, which is patterned. The peripheral trace includes a conductive layer and a second portion of the metal nanowire layer, both of which are patterned in a co-etch step. The conductive layer and the second portion of the metal nanowire layer have a coplanar etched surface. The second touch sensing electrode is formed on an insulating layer and connects with the second trace.

Abstract: Described is a system for automated event summarization. A multi-layer network representing a multimodal data set is generated, where nodes within a given layer represent information tokens in a given modality. A topically diverse set of nodes is ranked and selected from each layer to represent temporal event highlights. Temporal event highlights are linked into storylines. Using the storylines, the system monitors a progression of an event or opinions regarding a topic. A temporal summary of the progression of the event or the opinions regarding the topic is generated.

Abstract: Described is an automatic anomaly detector that receives a time-series of normal and abnormal activities that include features related to entities within a computing system. A feature coherence graph for the features is constructed, with the graph then clustered such that feature spaces of entities are expanded to include features that live within a same cluster but belong to separate entities. The feature spaces are unified by mapping representations of the features spaces into a Euclidean space of feature vectors. The feature vectors related to each feature are then aligned. Sets of clusters of related abnormal activities are then generated by regressing each feature vector over only those features that it possesses. The sets of clusters are used to detect anomalous behavior. The system then identifies a node within the computer system generating the anomalous behavior and initiates an action to minimize a threat posed by the node.

Abstract: Described is a system for neural decoding of neural activity. Using at least one neural feature extraction method, neural data that is correlated with a set of behavioral data is transformed into sparse neural representations. Semantic features are extracted from a set of semantic data. Using a combination of distinct classification modes, the set of semantic data is mapped to the sparse neural representations, and new input neural data can be interpreted.

Abstract: Described is a system for inferring network dynamics and their sources within the network. During operation, a vector representation is generated based on states of agents in a network. The vector representation including attribute vectors that correspond to the states of the agents in the network. A matrix representation is then generated based on the changing states of agents by packing the attribute vectors at each time step into an attribute matrix. Time-evolving states of the agents are learned using dictionary learning. Influential source agents in the network are then identified by performing dimensionality reduction on the attribute matrix. Finally, in some aspects, an action is executed based on the identity of the influential source agents. For example, marketing material may be directed to a source agent's online account, or the source agent's online account can be deactivated or terminated or some other desired action can be taken.

Abstract: A method for creating a vacuum in a load lock chamber is provided. The method includes building an air-tight environment in the load lock chamber. The method further includes reducing the pressure in a gas tank to a predetermined vacuum pressure. The method also includes enabling an exchange of gas between the load lock chamber and the gas tank when the pressure in the gas tank is at the predetermined vacuum pressure so as to reduce the pressure in the load lock chamber to an adjusted vacuum pressure.

Abstract: A system for a semiconductor fabrication facility includes a manufacturing tool including a load port, a maintenance tool including a first track and at least one maintenance crane on the first track, a rectangular zone overlapping with the load port, a plurality of first sensors on the first track and at corners of the rectangular zone configured to detect a location of the maintenance crane and generate a first location date, a transporting tool including a second track and a OHT vehicle on the second track, at least a second sensor on the OHT vehicle and configured to generate a second location data, at least a third sensor on the load port, and a control unit configured to receive the first location data and the second location data, and send signals to the second sensor and the third sensor or to cut off the signal to the second sensor.

Abstract: An EUV collector mirror for an extreme ultra violet (EUV) radiation source apparatus includes an EUV collector mirror body on which a reflective layer as a reflective surface is disposed, a trajectory correcting device attached to or embedded in the EUV collector mirror body and a trajectory correcting device to adjust the trajectory of metal from the reflective surface of the EUV collector mirror body to an opposite side of the EUV collector mirror body.

Abstract: A Static Random Access Memory (SRAM) cell includes a write port including a first inverter including a first pull-up transistor and a first pull-down transistor, and a second inverter including a second pull-up transistor and a second pull-down transistor and cross-coupled with the first inverter; and a read port including a read pass-gate transistor and a read pull-down transistor serially connected to each. A first doped concentration of impurities doped in channel regions of the second pull-down transistor and the read pull-down transistor is greater than a second doped concentration of the impurities doped in a channel region of the first pull-down transistor, or the impurities are doped in the channel regions of the second pull-down transistor and the read pull-down transistor and are not doped in the channel region of the first pull-down transistor.

Abstract: Described is a video scene analysis system. The system includes a salience module that receives a video stream having one more pairs of frames (each frame having a background and a foreground) and detects salient regions in the video stream to generate salient motion estimates. The salient regions are regions that move differently than dominant motion in the pairs of video frames. A scene modeling module generates a sparse foreground model based on salient motion estimates from a plurality of consecutive frames. A foreground refinement module then generates a Task-Aware Foreground by refining the sparse foreground model based on task knowledge. The Task-Aware Foreground can then be used for further processing such as object detection, tracking or recognition.