Patents by Inventor Kanji Furuhashi

Kanji Furuhashi has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Charged particle beam apparatus, and image generation method with charged particle beam apparatus
    Patent number: 8168950
    Abstract: The present invention has a subject to provide an apparatus that optimizes scanning in accordance with circumstances or purposes, reduces distortion of images, and improves throughput, image quality, and defect detection rate by controlling deflection of a charged particle beam in a stage tracking system.
    Type: Grant
    Filed: November 19, 2008
    Date of Patent: May 1, 2012
    Assignee: Hitachi High-Technologies Corporation
    Inventors: Kanji Furuhashi, Shuji Kikuchi, Akira Karakama, Yasuhiro Gunji
  • CHARGED PARTICLE BEAM APPARATUS, AND IMAGE GENERATION METHOD WITH CHARGED PARTICLE BEAM APPARATUS
    Publication number: 20090134340
    Abstract: The present invention has a subject to provide an apparatus that optimizes scanning in accordance with circumstances or purposes, reduces distortion of images, and improves throughput, image quality, and defect detection rate by controlling deflection of a charged particle beam in a stage tracking system.
    Type: Application
    Filed: November 19, 2008
    Publication date: May 28, 2009
    Inventors: Kanji FURUHASHI, Shuji Kikuchi, Akira Karakama, Yasuhiro Gunji