Patents by Inventor Kanji Kawata

Kanji Kawata has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Polishing composition and polishing method using the same
    Patent number: 8647527
    Abstract: A polishing composition contains a vanadate such as ammonium vanadate, sodium vanadate, and potassium vanadate and an oxygen donor such as hydrogen peroxide and ozone. It is preferable that the polishing composition further contains at least either one of abrasive grains and a pH adjusting agent. The polishing composition can be suitably used for polishing a silicon carbide wafer such as a hexagonal silicon carbide single crystal wafer.
    Type: Grant
    Filed: January 23, 2008
    Date of Patent: February 11, 2014
    Assignee: Fujimi Incorporated
    Inventors: Kazutoshi Hotta, Kanji Kawata