Patents by Inventor Kao-Tsai Tsai

Kao-Tsai Tsai has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Alternating phase shift mask
    Patent number: 6977127
    Abstract: An alternating phase shift mask. The alternating phase shift mask includes a transparent substrate, a light-shielding layer disposed on the transparent substrate to define a transparent array consisting of a plurality of first phase rows and a plurality of second phase rows alternately interposed between the first phase rows. The alternating phase shift mask further comprises a phase interference enhancement feature disposed a predetermined distance from the outermost row of the transparent array, wherein the phases of the phase interference enhancement feature and the outermost row are reverse.
    Type: Grant
    Filed: December 16, 2002
    Date of Patent: December 20, 2005
    Assignee: Winbond Electronics Corp.
    Inventors: Chii-Ming Shiah, Yi-Yu Hsu, Yu-Cheng Tung, Hung-Yueh Liao, Kao-Tsai Tsai, Jong-Bor Wang
  • Alternating phase shift mask
    Publication number: 20030134207
    Abstract: An alternating phase shift mask. The alternating phase shift mask includes a transparent substrate, a light-shielding layer disposed on the transparent substrate to define a transparent array consisting of a plurality of first phase rows and a plurality of second phase rows alternately interposed between the first phase rows. The alternating phase shift mask further comprises a phase interference enhancement feature disposed a predetermined distance from the outermost row of the transparent array, wherein the phases of the phase interference enhancement feature and the outermost row are reverse.
    Type: Application
    Filed: December 16, 2002
    Publication date: July 17, 2003
    Inventors: Chii-Ming Shiah, Yi-Yu Hsu, Yu-Cheng Tung, Hung-Yueh Liao, Kao-Tsai Tsai, Jong-Bor Wang