Patents by Inventor Kaoru Kikukawa

Kaoru Kikukawa has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Precursor for formation of europium-containing thin film, and method for forming europium-containing thin film
    Patent number: 8747965
    Abstract: Provided are a novel europium compound which has a melting point of 180° C. or lower and can be stably supplied by bubbling in a chemical vapor deposition method or an atomic layer deposition method, a precursor for forming a europium-containing thin film based on the compound, and a method for forming a europium-containing thin film using this precursor. A europium-containing thin film is formed using bis(tetramethylmonoalkylcyclopentadienyl)europium as a precursor for forming a europium-containing thin film by a chemical vapor deposition method or anatomic layer deposition method.
    Type: Grant
    Filed: February 23, 2012
    Date of Patent: June 10, 2014
    Assignee: Kabushikikaisha Kojundokagaku Kenkyusho
    Inventors: Takayuki Mogi, Yoshinori Kuboshima, Shintaro Higashi, Kaoru Kikukawa
  • PRECURSOR FOR FORMATION OF EUROPIUM-CONTAINING THIN FILM, AND METHOD FOR FORMING EUROPIUM-CONTAINING THIN FILM
    Publication number: 20140024814
    Abstract: Provided are a novel europium compound which has a melting point of 180° C. or lower and can be stably supplied by bubbling in a chemical vapor deposition method or an atomic layer deposition method, a precursor for forming a europium-containing thin film based on the compound, and a method for forming a europium-containing thin film using this precursor. A europium-containing thin film is formed using bis(tetramethylmonoalkylcyclopentadienyl)europium as a precursor for forming a europium-containing thin film by a chemical vapor deposition method or anatomic layer deposition method.
    Type: Application
    Filed: February 23, 2012
    Publication date: January 23, 2014
    Applicant: KABUSHIKIKAISHA KOJUNDOKAGAKU KENKYUSHO
    Inventors: Takayuki Mogi, Yoshinori Kuboshima, Shintaro Higashi, Kaoru Kikukawa