Abstract: A shape measurement method of the present invention includes: a step of irradiating a measurement object with an optical pulse train in which a plurality of optical pulses that have predetermined frequency distributions on a time axis are disposed chronologically in numerical order; and a step of measuring an optical shape of the measurement object in accordance with a correspondent relation between numbers of the optical pulses of a plurality of detection target optical pulse trains after the emitted optical pulse train acts on the measurement object and a correspondent relation between the frequency distributions in the optical pulses.

Abstract: A shape measurement method of the present invention includes: a step of irradiating a measurement object with an optical pulse train in which a plurality of optical pulses that have predetermined frequency distributions on a time axis are disposed chronologically in numerical order; and a step of measuring an optical shape of the measurement object in accordance with a correspondent relation between numbers of the optical pulses of a plurality of detection target optical pulse trains after the emitted optical pulse train acts on the measurement object and a correspondent relation between the frequency distributions in the optical pulses.

Abstract: An object is positioned in space by using a beam splitter to split a low-coherence laser light beam into a probe beam and a reference beam. The probe beam is projected at the target object, while the reference beam is reflected by a pair of mirrors synchronized along light paths and scanned at different amplitudes, to form two beams of equal intensity, and light reflected by the object and the interference fringes are detected together to obtain fringe signals with sharpened profile lines.