Patents by Inventor Kaoru Naoi

Kaoru Naoi has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Patent number: 8984971
    Abstract: In a parallel slider device with a pneumatic linear guide, the stiffness of the mechanical coupling and the air bearing stiffness are prevented from interfering each other such that the parallelism between the two sliders can be maintained at a high precision in a highly reproducible manner. A difference in the slider support stiffness (air bearing stiffness) between a first pneumatic linear guide and a second pneumatic linear guide by varying the sizes of the air gaps and the supply air pressures so that any error in the linearity is accommodated by the changes in the air gap on the side of the linear guide having a lower slider support stiffness in a stable manner.
    Type: Grant
    Filed: March 10, 2010
    Date of Patent: March 24, 2015
    Assignee: Kuroda Precision Industries Ltd.
    Inventors: Kaoru Naoi, Yoichi Ishizaki, Tatsuhito Inouchi, Koichi Sekiguchi
  • Patent number: 8819952
    Abstract: In a parallel slider device, the two sliders are allowed to move in a smooth manner without interfering with each other. A same position command is given to a front servo controller for a front linear servo motor and a rear servo controller for a rear linear servo motor, and the front servo controller and the rear servo controller are provided with mutually different control gains.
    Type: Grant
    Filed: March 10, 2010
    Date of Patent: September 2, 2014
    Assignee: Kuroda Precision Industries Ltd.
    Inventors: Kaoru Naoi, Yoichi Ishizaki, Tatsuhito Inouchi, Masahiro Iwasaki
  • Publication number: 20130008042
    Abstract: In a parallel slider device, the two sliders are allowed to move in a smooth manner without interfering with each other. A same position command is given to a front servo controller for a front linear servo motor and a rear servo controller for a rear linear servo motor, and the front servo controller and the rear servo controller are provided with mutually different control gains.
    Type: Application
    Filed: March 10, 2010
    Publication date: January 10, 2013
    Applicant: KURODA PRECISION INDUSTRIES LTD.
    Inventors: Kaoru Naoi, Yoichi Ishizaki, Tatsuhito Inouchi, Masahiro Iwasaki
  • Publication number: 20120318078
    Abstract: In a parallel slider device with a pneumatic linear guide, the stiffness of the mechanical coupling and the air bearing stiffness are prevented from interfering each other such that the parallelism between the two sliders can be maintained at a high precision in a highly reproducible manner. A difference in the slider support stiffness (air bearing stiffness) between a first pneumatic linear guide and a second pneumatic linear guide by varying the sizes of the air gaps and the supply air pressures so that any error in the linearity is accommodated by the changes in the air gap on the side of the linear guide having a lower slider support stiffness in a stable manner.
    Type: Application
    Filed: March 10, 2010
    Publication date: December 20, 2012
    Applicant: KURODA PRECISION INDUSTRIES LTD
    Inventors: Kaoru Naoi, Yoichi Ishizaki, Tatsuhito Inouchi, Koichi Sekiguchi
  • Patent number: 6367159
    Abstract: Method for measuring the surface shape of a thin element such as a silicon wafer measures the surface shapes of one surface and the other surface of the thin element by independently measuring the distance each to one surface and to the other surface of the thin element by rotating or moving the thin element within a single plane and independently moving the first and second measuring means along the first and second guide shafts. Apparatus for measuring the surface shape of the thin element measures the surface shapes of one surface and the other surface of the thin element by rotating or moving the thin element supported within the same plane by a supporting means, and independently measuring the distance each to one surface and to the other surface of the thin element by the first and second measuring means while independently moving the first and second sliders along the first and second guide shafts.
    Type: Grant
    Filed: March 30, 1999
    Date of Patent: April 9, 2002
    Assignee: Kuroda Precision Industries, Ltd.
    Inventors: Kaoru Naoi, Kenichi Shindo, Shinju Ito
  • Patent number: 6212786
    Abstract: A thin board holding device 2A for holding a thin board in a plane state to measure the thickness of a thin board is disclosed, which has a number of spot supports 3 with adsorbing portion for holding a thin board 1 attached by suction to the top. The thin board 1 is held in a multiple point support fashion to the spot supports 3. By moving a measuring terminal of a measuring instrument to a measuring point on the thin board, which has one surface of the thin board 1 set on the thin board holding device 2A, the level of the other surface of the thin board 1 from a reference surface A supporting the thin board holding device at a reference position is measured. The dimension from the reference position A to a thin board adsorption surface 3a of the spot support 3 is used as a computational constant, and the thickness of the thin board is calculated from the measured level of the other surface of the thin board 1 and the computational constant.
    Type: Grant
    Filed: April 14, 1997
    Date of Patent: April 10, 2001
    Assignee: Kuroda Precision Industries, Ltd.
    Inventor: Kaoru Naoi