Abstract: Information processing systems including a plurality of integrated circuit chips have had problems such as an increased cost due to an increase in the number of terminals related to settings of an interface between the chips and delayed program transfer. An information processing system is provided in which a plurality of integrated circuit chips each include a plurality of communication units to be initialized by a common setting terminal. A processing execution unit of a first integrated circuit chip set to a first mode starts establishing a communication connection through one of the initialized communication units to one of the communication units of a second integrated circuit chip set to a second mode.

Abstract: A transfer control apparatus transfers video data obtained by image capturing in an image capturing and displaying apparatus to an image processing apparatus, and transfers video data generated by the image processing apparatus to the image capturing and displaying apparatus. In the transfer control apparatus, a first converter outputs an optical signal converted from an electrical signal representing the video data, an optical fiber transfers the optical signal, a second converter outputs an electrical signal converted from the optical signal transferred by the optical fiber, and a metal wire transfers a control signal indicating whether it is possible to communicate the video data by a communication unit of the image capturing and displaying apparatus. Operations of the first and second converters are controlled based on the control signal.

Abstract: A transfer control apparatus transfers video data obtained by image capturing in an image capturing and displaying apparatus to an image processing apparatus, and transfers video data generated by the image processing apparatus to the image capturing and displaying apparatus. In the transfer control apparatus, a first converter outputs an optical signal converted from an electrical signal representing the video data, an optical fiber transfers the optical signal, a second converter outputs an electrical signal converted from the optical signal transferred by the optical fiber, and a metal wire transfers a control signal indicating whether it is possible to communicate the video data by a communication unit of the image capturing and displaying apparatus. Operations of the first and second converters are controlled based on the control signal.

Abstract: An exposure apparatus includes a projection optical system configured to project a pattern of an original onto a substrate via a liquid, to expose the substrate to light, a stage mechanism including a stage configured to hold the substrate, an immersion unit configured to supply a liquid to a gap between the substrate or the stage and the projection optical system and to recover the liquid from the gap, and a controller configured to shut off power supply to the immersion unit after determining that recovery of the liquid by the immersion unit is completed up to a target level, if a power-off request is received.

Abstract: An immersion exposure apparatus that projects a pattern of an original onto a substrate via a projection optical system and a liquid, thereby exposing the substrate. A substrate stage mechanism includes a substrate stage to hold the substrate. An immersion unit supplies the liquid into a space between the substrate or the substrate stage and the projection optical system, and recovers the liquid from above the substrate or the substrate stage. A control unit controls the immersion unit to recover the liquid from above the substrate or the substrate stage, and then controls the substrate stage mechanism to move the substrate stage to a retreat position, in response to a shutoff request for requesting shutoff of electrical power supply to the substrate stage mechanism.

Abstract: An exposure apparatus includes a projection optical system configured to project a pattern of an original onto a substrate via a liquid to expose the substrate to light, a stage mechanism including a stage configured to hold the substrate, an immersion unit configured to supply a liquid to a gap between the substrate or the stage and the projection optical system and to recover the liquid from the gap, and a controller configured to shut off power supply to the immersion unit after determining that recovery of the liquid by the immersion unit is completed up to a target level, if a power-off request is received.

Abstract: An immersion exposure apparatus which projects a pattern of an original onto a substrate to expose the substrate, comprises a substrate stage mechanism including a substrate stage configured to hold the substrate, an immersion unit configured to supply the liquid into a space between the substrate or the substrate stage and the projection optical system, and recover the liquid from above the substrate or the substrate stage, and a control unit configured to control the immersion unit to recover the liquid from above the substrate or the substrate stage, and then control the substrate stage mechanism to move the substrate stage to a retreat position, in response to a shutoff request for requesting shutoff of electric power supply to the substrate stage mechanism.

Abstract: An immersion exposure apparatus projects and transfers a pattern onto a photosensitive substrate through a projection optical system with a liquid being supplied to the immersion space between the projection optical system and the photosensitive substrate. The immersion exposure apparatus includes a temperature detector which detects the temperature of the liquid in the immersion space, and a controller which controls, on the basis of an output from the temperature detector, the position and/or tilt of a movable unit that influences the imaging performance of the pattern to be projected onto the photosensitive substrate.