Patents by Inventor Kaoru Tsuruta

Kaoru Tsuruta has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Publication number: 20190174031
    Abstract: To provide a user-friendly electronic device, the electronic device includes: a first unit including a first operation unit; a second unit attachable to/detachable from the first unit; and a control unit configured to make presentation of the first operation unit in a state where the first unit and the second unit are attached to each other different from presentation of the first operation unit in a state where the first unit and the second unit are detached from each other.
    Type: Application
    Filed: February 11, 2019
    Publication date: June 6, 2019
    Applicant: NIKON CORPORATION
    Inventors: Kaoru YOSHINO, Hiroshi KASAI, Tomoyuki SASHIMA, Mayuko ITO, Kaori TSURUTA, Masakazu SEKIGUCHI, Hiroshi KAMEHARA, Yu MURAKOSHI
  • Publication number: 20190127847
    Abstract: A drawing apparatus includes: a drawing part; a cleaning-gas generator; a first valve between the cleaning-gas generator and the drawing part and adjusting a supply amount of gas to the drawing part; a first pressure gauge measuring a pressure in the drawing part; a compensation-gas introducing part introducing compensation-gas to be supplied between the cleaning-gas generator and the first valve; a second valve between the compensation-gas introducing part and the first valve and adjusting a supply amount of the compensation-gas; and a valve controller controlling the first and second valves, wherein the valve controller controls the first valve to supply the cleaning-gas at a predetermined flow rate to the drawing part and controls the second valve to cause a pressure in the drawing part to be a predetermined pressure when the first pressure gauge detects a pressure reduction due to a reduction in a supply flow rate of the cleaning-gas.
    Type: Application
    Filed: October 23, 2018
    Publication date: May 2, 2019
    Applicant: NUFLARE TECHNOLOGY, INC.
    Inventors: Satoshi NAKAHASHI, Kaoru TSURUTA
  • Patent number: 9472372
    Abstract: A charged particle beam writing apparatus includes a stage configured to mount a sample placed thereon; an electron optical column including a charged particle gun and deflector, wherein the charged particle gun is configured to emit a charged particle beam, and the deflector includes a plurality of deflecting electrodes configured to control a path of the charged particle beam; an ozone introducing mechanism configured to introduce ozone into the electron optical column; a first voltage supply unit configured to apply a deflection voltage to the plurality of deflecting electrodes to deflect the charged particle beam; and a second voltage supply unit configured to apply an identical negative DC voltage to the plurality of deflecting electrodes, wherein a negative voltage in which the deflection voltage and the negative DC voltage are added is applied to the plurality of deflecting electrodes while the sample is irradiated by the charged particle beam.
    Type: Grant
    Filed: July 14, 2015
    Date of Patent: October 18, 2016
    Assignee: NuFlare Technology, Inc.
    Inventors: Taku Yamada, Kaoru Tsuruta, Yasuyuki Taneda, Kenji Ohtoshi
  • Publication number: 20160020063
    Abstract: A charged particle beam writing apparatus includes a stage configured to mount a sample placed thereon; an electron optical column including a charged particle gun and deflector, wherein the charged particle gun is configured to emit a charged particle beam, and the deflector includes a plurality of deflecting electrodes configured to control a path of the charged particle beam; an ozone introducing mechanism configured to introduce ozone into the electron optical column; a first voltage supply unit configured to apply a deflection voltage to the plurality of deflecting electrodes to deflect the charged particle beam; and a second voltage supply unit configured to apply an identical negative DC voltage to the plurality of deflecting electrodes, wherein a negative voltage in which the deflection voltage and the negative DC voltage are added is applied to the plurality of deflecting electrodes while the sample is irradiated by the charged particle beam.
    Type: Application
    Filed: July 14, 2015
    Publication date: January 21, 2016
    Applicant: NuFlare Technology, Inc.
    Inventors: Taku Yamada, Kaoru Tsuruta, Yasuyuki Taneda, Kenji Ohtoshi
  • Patent number: 9190245
    Abstract: A charged particle beam writing apparatus includes an emission unit to emit a charged particle beam, a stage to mount thereon a target object to be written, an objective lens to focus the charged particle beam on a surface of the target object, a chamber to house the stage, a measurement unit to measure a partial pressure of a predetermined gas in the chamber in a state where a pressure inside the chamber is controlled to be lower than an atmospheric pressure, and an adjustment unit to adjust a focus position for focusing the charged particle beam on the target object, based on the partial pressure of the predetermined gas.
    Type: Grant
    Filed: January 28, 2015
    Date of Patent: November 17, 2015
    Assignee: NuFlare Technology, Inc.
    Inventors: Tomoo Motosugi, Takayuki Ohnishi, Kaoru Tsuruta, Kenji Ohtoshi
  • Publication number: 20150228455
    Abstract: A charged particle beam writing apparatus includes an emission unit to emit a charged particle beam, a stage to mount thereon a target object to be written, an objective lens to focus the charged particle beam on a surface of the target object, a chamber to house the stage, a measurement unit to measure a partial pressure of a predetermined gas in the chamber in a state where a pressure inside the chamber is controlled to be lower than an atmospheric pressure, and an adjustment unit to adjust a focus position for focusing the charged particle beam on the target object, based on the partial pressure of the predetermined gas.
    Type: Application
    Filed: January 28, 2015
    Publication date: August 13, 2015
    Applicant: NuFlare Technology, Inc.
    Inventors: Tomoo MOTOSUGI, Takayuki OHNISHI, Kaoru TSURUTA, Kenji OHTOSHI
  • Patent number: 8748843
    Abstract: A charged particle beam drawing apparatus of an embodiment includes: a drawing unit to perform drawing on a workpiece on a stage by using a charged particle beam; multiple marks located on the stage and having different heights; an irradiation position detector to, when any of the marks is irradiated with the charged particle beam, detect an irradiation position of the charged particle beam on a mark surface of the mark; a drift-amount calculation unit to calculate a drift amount of the charged particle beam on the mark surface by using the irradiation position; a drift-amount processing unit to obtain a drift amount on a workpiece surface by using the drift amounts on at least two of the mark surfaces; and a drawing controller to correct an is irradiation position of the charged particle beam by using the drift amount on the workpiece surface.
    Type: Grant
    Filed: August 7, 2012
    Date of Patent: June 10, 2014
    Assignee: NuFlare Technology, Inc.
    Inventor: Kaoru Tsuruta
  • Publication number: 20130037724
    Abstract: A charged particle beam drawing apparatus of an embodiment includes: a drawing unit to perform drawing on a workpiece on a stage by using a charged particle beam; multiple marks located on the stage and having different heights; an irradiation position detector to, when any of the marks is irradiated with the charged particle beam, detect an irradiation position of the charged particle beam on a mark surface of the mark; a drift-amount calculation unit to calculate a drift amount of the charged particle beam on the mark surface by using the irradiation position; a drift-amount processing unit to obtain a drift amount on a workpiece surface by using the drift amounts on at least two of the mark surfaces; and a drawing controller to correct an is irradiation position of the charged particle beam by using the drift amount on the workpiece surface.
    Type: Application
    Filed: August 7, 2012
    Publication date: February 14, 2013
    Applicant: NuFlare Technology, Inc.
    Inventor: Kaoru TSURUTA
  • Patent number: 8183544
    Abstract: A correcting substrate for a charged particle beam lithography apparatus includes a substrate body using a low thermal expansion material having a thermal expansion lower than that of a silicon oxide (SiO2) material; a first conductive film arranged above the substrate; and a second conductive film selectively arranged on the first conductive film and having a reflectance higher than the first conductive film, wherein the low thermal expansion material is exposed on a rear surface of the correcting substrate.
    Type: Grant
    Filed: March 20, 2009
    Date of Patent: May 22, 2012
    Assignee: NuFlare Technology, Inc.
    Inventors: Kaoru Tsuruta, Takashi Kamikubo, Rieko Nishimura, Shusuke Yoshitake, Shuichi Tamamushi
  • Publication number: 20110089346
    Abstract: Irradiation position errors of a first charged-particle-beam writing apparatus are calculated by scanning a charged-particle beam across a calibration substrate on which two films having different reflectances are formed, with the calibration substrate being placed inside the first writing apparatus, and by then detecting signals indicative of charged particles reflected from the calibration substrate. Irradiation position errors of a second charged-particle-beam writing apparatus are calculated in a similar manner. Then, the differences between the calculated irradiation position errors of the first writing apparatus and the calculated irradiation position errors of the second writing apparatus are calculated to correct the irradiation position errors of the second writing apparatus based on the calculated differences.
    Type: Application
    Filed: October 12, 2010
    Publication date: April 21, 2011
    Applicant: NuFlare Technology, Inc.
    Inventor: Kaoru Tsuruta
  • Publication number: 20090242807
    Abstract: A correcting substrate for a charged particle beam lithography apparatus includes a substrate body using a low thermal expansion material having a thermal expansion lower than that of a silicon oxide (SiO2) material; a first conductive film arranged above the substrate; and a second conductive film selectively arranged on the first conductive film and having a reflectance higher than the first conductive film, wherein the low thermal expansion material is exposed on a rear surface of the correcting substrate.
    Type: Application
    Filed: March 20, 2009
    Publication date: October 1, 2009
    Applicant: NuFlare Technology, Inc.
    Inventors: Kaoru TSURUTA, Takashi KAMIKUBO, Rieko NISHIMURA, Shusuke YOSHITAKE, Shuichi TAMAMUSHI