Abstract: A monitor wafer is processed by a processing apparatus, and thereafter, it is subjected to an inspection in a foreign object inspection apparatus in accordance with an inspection recipe. A measured result obtained by the inspection is compiled and analyzed in a data management system. Generally, a monitor wafer is not assigned a rot name or a wafer name, however, the measured result is assigned an identification name for identifying plural processing apparatuses from one another, and is stored in a database as storage data.

Abstract: A monitor wafer is processed by a processing apparatus, and thereafter, it is subjected to an inspection in a foreign object inspection apparatus in accordance with an inspection recipe. A measured result obtained by the inspection is compiled and analyzed in a data management system. Generally, a monitor wafer is not assigned a rot name or a wafer name, however, the measured result is assigned an identification name for identifying plural processing apparatuses from one another, and is stored in a database as storage data.

Abstract: A quality management system (S100) comprises a data processing unit (11), a processed-data judgment unit (12) receiving an output from the data processing unit (11), a sampling unit (13) receiving an output from the processed-data judgment unit (12), a file making unit (14) receiving an output from the sampling unit (13), a data processing unit (15) receiving an output from an observation unit (20) and a processed-data judgment unit (16) receiving an output from the data processing unit (15). The system (S100) having this constitution allows reduction in labor and time from finding of a defect to recognition of occurrence of abnormal condition and improvement in accuracy of fatality rate of the defect.