Patents by Inventor Karen L. E. Turnquest

Karen L. E. Turnquest has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Method and apparatus for improved focus in optical processing
    Patent number: 6337217
    Abstract: The present invention provides for a method and an apparatus for performing automatic control adjustments during photolithography processes. A plurality of semiconductor devices are processed. Optical data analysis is performed upon at least one of the processed semiconductor device. Control adjustments to the processing is performed in response to the optical data analysis.
    Type: Grant
    Filed: February 14, 2000
    Date of Patent: January 8, 2002
    Assignee: Advanced Micro Devices, Inc.
    Inventors: Frederick N. Hause, Karen L. E. Turnquest