Patents by Inventor Karen L. Lestage

Karen L. Lestage has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • OXIDE MEMS BEAM
    Publication number: 20120133006
    Abstract: In one embodiment, a semiconductor structure includes a beam positioned within a sealed cavity, the beam including: an upper insulator layer including one or more layers; and a lower insulator layer including one or more layers, wherein a composite stress of the upper insulator layer is different than a composite stress of the lower insulator layer, such that the beam bends.
    Type: Application
    Filed: November 29, 2010
    Publication date: May 31, 2012
    Applicant: INTERNATIONAL BUSINESS MACHINES CORPORATION
    Inventors: Joseph P. Hasselbach, Karen L. Lestage, Anthony K. Stamper
  • Forming an oxide MEMS beam
    Patent number: 8138008
    Abstract: Solutions for forming a semiconductor including an oxide MEMS beam are disclosed. In one embodiment, a method of forming a beam within a sealed cavity includes: depositing a lower insulator layer comprising one or more layers; depositing an upper insulator layer over the first insulator layer, the upper insulator layer comprising one or more layers, wherein a composite stress of the upper insulator layer is different than a composite stress of the lower insulator layer.
    Type: Grant
    Filed: November 29, 2010
    Date of Patent: March 20, 2012
    Assignee: International Business Machines Corporation
    Inventors: Joseph P. Hasselbach, Karen L. Lestage, Anthony K. Stamper