Abstract: An integrated vacuum package having an added volume on a perimeter within the perimeter of a bonding seal between two wafers. The added volume of space may be an etching of material from the inside surface of the top wafer. This wafer may have vent holes that may be sealed to maintain a vacuum within the volume between the two wafers after the pump out of gas and air. The inside surface of the top wafer may have an anti-reflective pattern. Also, an anti-reflective pattern may be on the outside surface of the top wafer. The seal between the two wafers may be ring-like and have a spacer material. Also, it may have a malleable material such as solder to compensate for any flatness variation between the two facing surfaces of the wafers.

Abstract: Embodiments of the present invention relate to detector structures for use in a micro gas analyzer, preferably in a differential setup. The detector structures may comprise one or more detector types, such as photo-ionization (PID), electron capture (ECD), ion mobility (IMS), differential mobility (DMS), ion-trap mass spectrometer (ITMS), in which all are provided with ions and electrons from one vacuum ultra violet (VUV) source. This source may also provide ions for ion-based gas pumps.

Abstract: A fuel cell, fuel cell array and methods of forming the same are disclosed. The fuel cell can be made by forming a first aperture defined by a first aperture surface through a first electrode layer and forming a second aperture defined by a second aperture surface through a second electrode layer. A proton exchange membrane is laminated between the first electrode layer and the second electrode layer. At least a portion of the first aperture is at least partially aligned with the second aperture.