Patents by Inventor Kari Hannukainen

Kari Hannukainen has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Pressure testing apparatus and method for pressure testing
    Patent number: 7595653
    Abstract: A pressure testing apparatus for chips on a wafer has a pressure chamber, a support plate arranged between the upper and lower parts of the housing, a wafer chuck, a testing device and a positioning device. The wafer chuck, the testing device and the positioning device are supported to the support plate and arranged inside the pressure chamber. The support plate has, inside the pressure chamber, an opening providing a gas connection between the upper and lower parts of the housing.
    Type: Grant
    Filed: July 20, 2005
    Date of Patent: September 29, 2009
    Assignee: Afore Oy
    Inventors: Vesa Henttonen, Kari Hannukainen
  • Pressure Testing Apparatus and Method for Pressure Testing
    Publication number: 20070245808
    Abstract: A pressure testing apparatus for chips on a wafer has a pressure chamber, a support plate arranged between the upper and lower parts of the housing, a wafer chuck, a testing means and a positioning device. The wafer chuck, the testing means and the positioning device are supported to the support plate and arranged inside the pressure chamber. The support plate has, inside the pressure chamber, an opening providing a gas connection between the upper and lower parts of the housing.
    Type: Application
    Filed: July 20, 2005
    Publication date: October 25, 2007
    Applicant: AFORE OY
    Inventors: Vesa Henttonen, Kari Hannukainen