Patents by Inventor Karin Elisabeth WITTING

Karin Elisabeth WITTING has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • THIN FILM MONITORING DEVICE AND METHOD
    Publication number: 20110292373
    Abstract: A method for determining a quality of an etched thin film deposited onto a transparent substrate is provided. The method includes depositing the thin film onto the transparent substrate. Then, the thin film is etched at least at portions of the transparent substrate. At least one transparency level of the transparent substrate having deposited thereon the at least partially etched thin film is measured at least at one wavelength in a wavelength range from 280 nm to 340 nm. Then the quality of the etch process is evaluated on the basis of the at least one measured transparency level.
    Type: Application
    Filed: June 1, 2010
    Publication date: December 1, 2011
    Applicant: APPLIED MATERIALS, INC.
    Inventors: Karin Elisabeth WITTING, Joachim BARTELLA, Juergen SCHROEDER