Abstract: A nozzle apparatus and method of use for extruding a conductive paste through a stencil or screen onto a substrate are disclosed. The nozzle includes a body and a conformable insert for contacting the screen. The method comprises the steps of obtaining a substrate and a patterned screen, contacting the screen with a nozzle comprising a nozzle body and a conformable nozzle insert, and extruding a paste through the nozzle and screen onto the substrate. The apparatus and method are particularly useful for producing patterned lines from extruded pastes in the manufacture of microelectronic components.

Abstract: An optical system for a beam scanning apparatus comprises a laser beam, a cylindrical first lens, a scanning mirror rotatable about an axis for deflecting and scanning the focused energy beam and a concave, toroidal mirror adapted to deflect the focused energy beam from the rotating mirror and collimate the beam. The toroidal mirror has a radius in a major axis equal to the focal length of the first lens and a radius in a minor axis equal to twice the focal length of the first lens, and is spaced from the first mirror a distance equal to the focal length of the first lens. Preferrably, the axis of rotation of the scanning mirror is non-orthogonal with respect to the direction of the beam from the first lens.