Abstract: A processing tool for manufacturing semiconductor devices, e.g. a lithography cluster, has a device transfer area with an optical sensor (e.g. CCD-camera), and an illumination system. A substrate (e.g., a semiconductor wafer, a reticle, or a mask for exposure on the wafer) that is transferred to or from one of its processing chambers can be scanned during its movement at low resolution. Scanning is performed before and after processing in at least one the processing chambers of the processing tool. The images are compared and optionally subtracted from each other. Defects imposed to the substrate due to contaminating particles only during the present processes with sizes larger than 10 &mgr;m are visible on the subtracted image. Defects imposed earlier are diminished as well as structures formed from a mask pattern below 10 &mgr;m. Pattern recognition allows efficient classification of the defects just detected in a processing tool.

Abstract: While a first leading semiconductor wafer (11) already processed in a process appliance (1) and belonging to a batch is being measured in a microscope measuring instrument (2) in relation to values for the structure parameters 30, a second or further semiconductor wafer (12) belonging to the batch is processed in the process appliance (1). An event signal (100) reports, for example, an inspection carried out successfully of the first wafer, so that the following wafers (12) no longer need to be inspected. Using the measured results, the process parameters (31) of the process appliance (1) are automatically readjusted. Events such as maintenance work or parameter drifts in trend maps etc. are detected in control units (8 or 9) and, via the output of an event signal (102), for example in an event database (40), lead to the event-based selection of structure parameters (30′) to be measured and/or to the initiation of a leading wafer (11).

Abstract: While a first leading semiconductor wafer (11) already processed in a process appliance (1) and belonging to a batch is being measured in a microscope measuring instrument (2) in relation to values for the structure parameters 30, a second or further semiconductor wafer (12) belonging to the batch is processed in the process appliance (1). An event signal (100) reports, for example, an inspection carried out successfully of the first wafer, so that the following wafers (12) no longer need to be inspected. Using the measured results, the process parameters (31) of the process appliance (1) are automatically readjusted. Events such as maintenance work or parameter drifts in trend maps etc. are detected in control units (8 or 9) and, via the output of an event signal (102), for example in an event database (40), lead to the event-based selection of structure parameters (30′) to be measured and/or to the initiation of a leading wafer (11).

Abstract: A printstream processor separates documents, e.g. in a printstream or batch, into a physical delivery printstream and an electronic delivery printstream based on delivery preferences stored in a database. The documents in the physical delivery printstream are printed and combined with physical inserts for physical delivery, e.g. by the U.S. Postal Server. The documents in the electronic delivery printstream are combined with electronic inserts for electronic delivery, for example, via electronic mail, facsimile, pager, or to a server on World Wide Web.

Abstract: A process for concentrating spent sulphuric acids particularly sulphuric acids which arise during the nitration of hydrocarbons with nitric acid in the presence of sulphuric acid, wherein single- or multi-stage concentration is effected under vacuum.

Abstract: A printstream processor separates documents, e.g. in a printstream or batch, into a physical delivery printstream and an electronic delivery printstream based on delivery preferences stored in a database. The documents in the physical delivery printstream are printed and combined with physical inserts for physical delivery, e.g. by the U.S. Postal Server. The documents in the electronic delivery printstream are combined with electronic inserts for electronic delivery, for example, via electronic mail, facsimile, pager, or to a server on World Wide Web.

Abstract: To obtain unequal angles of turn for two-steerable wheels of a vehicle inexpensively, each wheel is turned through a gear. The two gears have a center to center distance corresponding to the track of the steerable wheels and are dimensioned to accommodate therebetween a meshing pinion mounted eccentrically on a swing arm. While driving one or each of the gears by means of a steering drive element in the same direction of rotation, the positive engagement of the two gears through the pinion and the eccentric mounting of the pinion on the swing arm produce a larger angle of turn of the wheel running inside the turn as compared to the angle of turn of the wheel running at the outside of the turn. To also ensure a steady, flutter-free straight run of the steerable wheels the swing arm end remote from the pinion is adjustable by a selected amount.

Abstract: A device for aligning a pallet or similar article both horizontally and vertically to facilitate a transfer to a support located at a predetermined horizontal position and height comprises first and second banks of engagement rollers which have axes disposed substantially horizontally and which are movable toward and away respective opposite sides of the pallet to engage the pallet underside from each side. In addition, the apparatus includes a vertical alignment member in the form of first and second banks of rollers which extend obliquely and are movable in an oblique plane toward and away from the respective sides of the pallet to engage it at a selected vertical height. The surfaces of the horizontal aligning rollers and vertical aligning rollers engage and support the pallet at a selected intersecting vertical and horizontal plates along its side. The vertical aligning rollers which extend obliquely are advantageously offset from the rollers which have axes which extend horizontally.