Abstract: A micromirror arrangement (1) having: at least one micromirror (3) having a reflective surface (11) formed at a mirror substrate (2), and an antireflective coating (7) formed at the mirror substrate (2) outside the reflective surface (11). A reflective coating (8) is formed within the reflective surface (11) and has at least two layer subsystems, wherein the first layer subsystem has layers (8e, 8f) composed of a periodic sequence of alternate high and low refractive index layers composed of a nonmetallic material and is optimized with regard to the reflectivity in respect of a used wavelength of the micromirror arrangement, and wherein the second layer subsystem is optimized with regard to the reflectivity in respect of a measurement wavelength of the micromirror arrangement, said measurement wavelength deviating from the used wavelength.

Abstract: The disclosure relates to a microlithographic projection exposure apparatus, such as are used for the production of large-scale integrated electrical circuits and other microstructured components. The disclosure relates in particular to coatings of optical elements in order to increase or reduce the reflectivity.

Abstract: An executable circuit design is used to generate waveforms, from which behaviors of the circuit are captured. The behaviors and various combinations thereof can then be saved in a database, along with descriptions and other metadata about them, thereby generating a behavioral index of the circuit design code. Behavioral indexing of circuit designs allows a user to maintain an indexed behavior database, track changes in behaviors as the circuit design's executable description evolves, and figure out how the executable description can be reused in different projects. When applied to digital design development, it facilities the current design and verification effort, as well as design reuse down the line.

Abstract: A micromirror arrangement (1)having: at least one micromirror (3) having a reflective surface (11) formed at a mirror substrate (2), and an antireflective coating (7) formed at the mirror substrate (2) outside the reflective surface (11). A reflective coating (8) is formed within the reflective surface (11) and has at least two layer subsystems, wherein the first layer subsystem has layers (8e, 8f) composed of a periodic sequence of alternate high and low refractive index layers composed of a nonmetallic material and is optimized with regard to the reflectivity in respect of a used wavelength of the micromirror arrangement, and wherein the second layer subsystem is optimized with regard to the reflectivity in respect of a measurement wavelength of the micromirror arrangement, said measurement wavelength deviating from the used wavelength.

Abstract: The disclosure relates to a microlithographic projection exposure apparatus, such as are used for the production of large-scale integrated electrical circuits and other microstructured components. The disclosure relates in particular to coatings of optical elements in order to increase or reduce the reflectivity.

Abstract: A pneumatic air tool includes a housing with a forward angle gearing arranged in a gearing chamber, a motor chamber, a rear air outlet section and a forward air outlet section. The motor chamber includes a pneumatic motor with air communication openings, which communicate with both the rear air outlet section, and the forward air outlet section. A part of the outlet air is ducted through the forward air outlet section including a circular groove in the housing which form part of a cooling chamber. The walls of the groove form together an enlarged heat transferring surface by which the heat generated in the angle gearing is efficiently transferred to the cold exhaust air from the motor passing through the cooling chamber. By communicating exhaust air through the cooling chamber there is obtained an efficient cooling of the angle gearing while maintaining favorable outer dimensions of the housing.

Abstract: at least one self oscillating loop circuit which oscillates with a switching frequency (fs), wherein the self oscillating loop circuit (18, 19, 20) comprises an output driver (19) which is switched with said switching frequency and a loop filter (20) which feeds back an amplified loop signal output by said driver (19) to an input of said self oscillating loop and a trimming circuit (21) for trimming the switching frequency (fs) of said self oscillating loop circuit.

Abstract: A pneumatic air tool includes a housing with a forward angle gearing arranged in a gearing chamber, a motor chamber, a rear air outlet section and a forward air outlet section. The motor chamber includes a pneumatic motor with air communication openings, which communicate with both the rear air outlet section, and the forward air outlet section. A part of the outlet air is ducted through the forward air outlet section including a circular groove in the housing which form part of a cooling chamber. The walls of the groove form together an enlarged heat transferring surface by which the heat generated in the angle gearing is efficiently transferred to the cold exhaust air from the motor passing through the cooling chamber. By communicating exhaust air through the cooling chamber there is obtained an efficient cooling of the angle gearing while maintaining favorable outer dimensions of the housing.

Abstract: In a projection objective provided for imaging a pattern arranged in an object plane of the projection objective into an image plane of the projection objective with the aid of an immersion medium arranged between a last optical element of the projection objective in the light path and the image plane, the last optical element has a transparent substrate and a protective layer system that is fitted to the substrate, is provided for contact with the immersion medium and serves for increasing the resistance of the last optical element to degradation caused by the immersion medium.

Abstract: The disclosure relates to a microlithographic projection exposure apparatus, such as are used for the production of large-scale integrated electrical circuits and other microstructured components. The disclosure relates in particular to coatings of optical elements in order to increase or reduce the reflectivity.

Abstract: In a projection objective provided for imaging a pattern arranged in an object plane of the projection objective into an image plane of the projection objective with the aid of an immersion medium arranged between a last optical element of the projection objective in the light path and the image plane, the last optical element has a transparent substrate and a protective layer system that is fitted to the substrate, is provided for contact with the immersion medium and serves for increasing the resistance of the last optical element to degradation caused by the immersion medium.

Abstract: In a projection objective provided for imaging a pattern arranged in an object plane of the projection objective into an image plane of the projection objective with the aid of an immersion medium arranged between a last optical element of the projection objective in the light path and the image plane, the last optical element has a transparent substrate and a protective layer system that is fitted to the substrate, is provided for contact with the immersion medium and serves for increasing the resistance of the last optical element to degradation caused by the immersion medium.

Abstract: A pneumatic power tool includes a housing, a motor, a pressure air inlet passage, an exhaust air outlet passage, and an exhaust air outlet flow deflector. The exhaust air outlet flow detector includes an outlet piece with radial as well as axial outlet openings and a valve element with radial as well as axial apertures. The outlet piece and the valve element are rotatable relative to the housing as well as to each other to bring a radial opening of the outlet piece into or out of alignment with a radial aperture of the valve element (21), and at the same time to bring the axial apertures of the valve element out of or into alignment with the openings of the outlet piece, thereby shifting the exhaust outlet flow direction as desired between a radial direction and an axial direction.

Abstract: A class D-amplifier which amplifies an input signal applied to an signal input of said amplifier (21) to generate an amplified signal output by an signal output (28a, 28b) of said amplifier comprising a comparator (23) which compares the applied input signal with a switch signal to generate a pulse width modulated signal; a driving unit (24) which amplifies the pulse width modulated signal to generate the amplified output signal; and a feedback circuit which generates the self oscillating switch signal for the comparator (23).

Abstract: The present invention provides an ink filter for an inkjet print cartridge, the print cartridge having nozzles for dispensing ink from an ink supply. The filter is formed of a polymeric material and is configured to prevent particles in the ink supply from passing to the print nozzles. The polymeric filter material is overmolded in a carrier which is configured to be coupled between the ink supply and the print nozzles.

Abstract: In a projection objective provided for imaging a pattern arranged in an object plane of the projection objective into an image plane of the projection objective with the aid of an immersion medium arranged between a last optical element of the projection objective in the light path and the image plane, the last optical element has a transparent substrate and a protective layer system that is fitted to the substrate, is provided for contact with the immersion medium and serves for increasing the resistance of the last optical element to degradation caused by the immersion medium.

Abstract: Refrigerant fluid such as CO2, compressed to the supercritical pressure by a compressor, is delivered selectively through a three-way valve, either into a branch of the circuit containing a cooler, an expansion device and an evaporator for cooling the cabin of a vehicle, or into a branch containing another expansion device and a heat exchanger for the purpose of heating the cabin.

Abstract: The present invention provides an ink filter for an inkjet print cartridge, the print cartridge having nozzles for dispensing ink from an ink supply. The filter is formed of a polymeric material and is configured to prevent particles in the ink supply from passing to the print nozzles. The polymeric filter material is overmolded in a carrier which is configured to be coupled between the ink supply and the print nozzles.