Patents by Inventor Karlfried Osterried

Karlfried Osterried has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Illumination system with a plurality of individual gratings
    Patent number: 6836530
    Abstract: There is provided an illumination system for wavelengths of ≦100 nm, having an object plane and a field plane. The illumination system includes a grating element having a plurality of gratings, and a diaphragm. The diaphragm is arranged after the grating element in a beam path from the object plane to the field plane.
    Type: Grant
    Filed: June 5, 2002
    Date of Patent: December 28, 2004
    Assignees: Carl Zeiss SMT AG, ASML Netherlands B.V.
    Inventors: Wolfgang Singer, Markus Weiss, Bernd Kleemann, Karlfried Osterried, Johannes Wangler, Frank Melzer, Andreas Heisler, Vadim Yevgenyevich Banine
  • Illumination system with a plurality of individual gratings
    Publication number: 20030099040
    Abstract: There is provided an illumination system for wavelengths of ≦100 nm, having an object plane and a field plane. The illumination system includes a grating element having a plurality of gratings, and a diaphragm. The diaphragm is arranged after the grating element in a beam path from the object plane to the field plane.
    Type: Application
    Filed: June 5, 2002
    Publication date: May 29, 2003
    Applicant: Carl Zeiss Cemiconductor Manufacturing Technologies AG
    Inventors: Wolfgang Singer, Markus Weiss, Bernd Kleemann, Karlfried Osterried, Johannes Wangler, Frank Melzer, Andreas Heisler, Vadim Yevgenyevich Banine
  • Device for the low-deformation support of an optical element and method for the low-deformation support of the optical element
    Patent number: 6441975
    Abstract: A device for the low-deformation support of an optical element (2), in particular of an end plate of a lens in a projection printing system for semiconductor elements, is provided with a mount (1), the optical element (2) being connected to the mount (1) at least partly via a bonding layer which is located between the adjacent circumferential walls (4, 5) of mount (1) and optical element (2). The mount (1) is provided with at least three bearing feet (3) which are distributed over the circumference and on which the optical element (2) rests. The bonding layer is located in an annular gap (6) between the adjacent circumferential walls (4, 5) of mount (1) and optical element (2) over at least one section thereof.
    Type: Grant
    Filed: November 27, 2000
    Date of Patent: August 27, 2002
    Assignee: Carl-Zeiss-Stiftung
    Inventors: Michael Ebert, Franz Sorg, Michael Trunz, Frank Marianek, Karlfried Osterried, Markus Kasparek