Patents by Inventor Karlheinz Hölzlein

Karlheinz Hölzlein has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Process for the thermal annealing of implantation-doped silicon carbide semiconductors
    Patent number: 6406983
    Abstract: A process for the thermal annealing of implantation-doped silicon carbide semiconductors in a gas stream brings practically no carbon to the silicon carbide semiconductor. In one embodiment, a container, a carrier, radiation shields and a baseplate are composed of a metal or a metal compound such as, for example, tantalum or tantalum carbide, at least at locations which come into contact with the gas stream.
    Type: Grant
    Filed: March 30, 2000
    Date of Patent: June 18, 2002
    Assignee: Infineon Technologies AG
    Inventors: Karlheinz Hölzlein, Roland Rupp, Arno Wiedenhofer