Abstract: A closure device including a closure element for closing an opening surrounded by a valve seat of the closure device. The closure device has an open state, in which the closure element exposes the opening at least partly, for an object to be led through the opening, an intermediate state, in which the closure element is brought into alignment with the opening without contact with the valve seat, and a closed state, in which the closure element at least rests on the valve seat via a seal of the closure device. The seal has a hollow space, to which a pressure medium from a pressure source of the closure device can be applied, and the closure device has a suction apparatus for sucking the pressure medium out of the hollow space of the seal.

Abstract: A closure device (1) including a closure element (2) for closing an opening (5, 6) of the closure device (1) that is surrounded by a valve seat (3, 4) of the closure device (1), wherein the closure device (1) has an open state of the closure element (2), in which the closure element (2) exposes the opening (5, 6) at least partly, in particular completely, for an object to be led through the opening (5, 6), and an intermediate state of the closure element (2), in which the closure element (2) is brought into alignment with the opening (5, 6) without contact with the valve seat (3, 4), and a closed state of the closure element (2), in which the closure element (2) at least rests on the valve seat (3, 4) via a seal (7, 8) of the closure device (1), wherein the seal (7, 8) has a hollow space (9), to which a pressure medium from a pressure source (10) of the closure device (1) can be applied, wherein the closure device (1) has a suction apparatus (11) for sucking the pressure medium out of the hollow space (9) of

Abstract: A vacuum valve closes a flow path in a gas-tight manner using a linear movement and includes a closure member, a first sealing surface of the valve housing that encloses the opening, and a corresponding second sealing surface of the closure member. In the closed position, the second sealing surface is in sealing contact with the first sealing surface. In the region between the opening and the first sealing surface, the valve housing includes a first sloped surface that encloses the opening, and the closure member includes a corresponding, parallel second sloped surface. The sloped surfaces, which have a sloping angle between 3 and 15 degrees relative to the geometric adjustment axis, are located such that, in the closed position of the closure member, the second sloped surface is arranged in a parallel position opposite the first sloped surface at a distance of 0 and 0.6 mm.

Abstract: The invention relates to a vacuum valve having a screw element for coupling a first component of the vacuum valve to a second component. The screw element has a force transfer surface section between a threaded surface section having a first thread and an engagement surface section, arranged in a first gas region, for a tool. The first and second component are coupled by a thread engagement, carried out through a passage hole in the first component, between the first thread and a second thread assigned to the second component. The screw element has a sealing surface section between the threaded surface section and the engagement surface section. Between the sealing surface section and a sealing face of the first component, a sealing seal element is arranged so the first gas region is separated in a gas-tight or particle-tight manner from a third gas region.

Abstract: A vacuum valve closes a flow path in a gas-tight manner using a linear movement and includes a closure member, a first sealing surface of the valve housing that encloses the opening, and a corresponding second sealing surface of the closure member. In the closed position, the second sealing surface is in sealing contact with the first sealing surface. In the region between the opening and the first sealing surface, the valve housing includes a first sloped surface that encloses the opening, and the closure member includes a corresponding, parallel second sloped surface. The sloped surfaces, which have a sloping angle between 3 and 15 degrees relative to the geometric adjustment axis, are located such that, in the closed position of the closure member, the second sloped surface is arranged in a parallel position opposite the first sloped surface at a distance of 0 and 0.6 mm.