Patents by Inventor Karli Hantzschmann

Karli Hantzschmann has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Method and system for operating a semiconductor factory
    Publication number: 20040118659
    Abstract: The present invention relates to a method and a system for operating a semiconductor factory. The factory comprises equipment (8) for processing semiconductor wafers, and an automated material handling system (12). The invention comprises clamping a wafer carrier (16) while a wafer is processed by a particular tool (10), continuing clamping the wafer carrier (16) after processing, and unclamping the wafer carrier (16) when the automated material handling system (12) is ready for removing the wafer carrier (16) from the tool (10).
    Type: Application
    Filed: December 20, 2002
    Publication date: June 24, 2004
    Inventors: Clinton Haris, Sven Hahn, Karli Hantzschmann, Andreas Wintergerst, Thomas Bauer, Dieter Schneider, Guy Davis, Martin Peiter