Patents by Inventor Karlik Bhupendra SHAH

Karlik Bhupendra SHAH has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • OVERLAP SUSCEPTOR AND PREHEAT RING
    Publication number: 20220325400
    Abstract: Embodiments disclosed herein generally provide improved control of gas flow in processing chambers. In at least one embodiment, a liner for a processing chamber includes an annular body having a sidewall and a vent formed in the annular body for exhausting gas from inside to outside the annular body. The vent comprises one or more vent holes disposed through the sidewall. The liner further includes an opening in the annular body for substrate loading and unloading.
    Type: Application
    Filed: April 7, 2021
    Publication date: October 13, 2022
    Inventors: Zhepeng CONG, Schubert CHU, Nyi Oo MYO, Karlik Bhupendra SHAH, Zhiyuan YE, Richard O. COLLINS