Patents by Inventor Karolis Zilvinas BAZILEVICIUS

Karolis Zilvinas BAZILEVICIUS has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Multi-segment focusing lens and the laser processing for wafer dicing or cutting
    Patent number: 11253955
    Abstract: The invention provides a multi-segment focusing lens for effective laser processing method that allows to cut/scribe/cleave/dice or, generally speaking, separate, hard, brittle, and solid wafers or glass sheets, which are either bare or have microelectronic or MEMS devices formed on them. The multi-segment focusing lens is used in a laser processing method comprises a step of modifying a pulsed laser beam by a shaping and focusing unit, including a multi-segment lens. Said multi-segment lens creates multiple beam convergence zones, more particularly, multiple focal points, said and interference spike shape intensity distribution exceeding the optical damage threshold of the workpiece material. Said interference spike shape intensity distribution is situated in the bulk of the workpiece. During the aforementioned step a modified area is created.
    Type: Grant
    Filed: June 14, 2016
    Date of Patent: February 22, 2022
    Assignee: Evana Technologies, UAB
    Inventors: Egidijus Vanagas, Dziugas Kimbaras, Karolis Zilvinas Bazilevicius
  • LASER PROCESSING METHOD AND A SYSTEM FOR WAFER DICING OR CUTTING BY USE OF A MULTI-SEGMENT FOCUSING LENS
    Publication number: 20190217420
    Abstract: The invention provides a multi-segment focusing lens for effective laser processing method that allows to cut/scribe/cleave/dice or, generally speaking, separate, hard, brittle, and solid wafers or glass sheets, which are either bare or have microelectronic or MEMS devices formed on them. The multi-segment focusing lens is used in a laser processing method comprises a step of modifying a pulsed laser beam by a shaping and focusing unit, including a multi-segment lens. Said multi-segment lens creates multiple beam convergence zones, more particularly, multiple focal points, said and interference spike shape intensity distribution exceeding the optical damage threshold of the workpiece material. Said interference spike shape intensity distribution is situated in the bulk of the workpiece. During the aforementioned step a modified area is created.
    Type: Application
    Filed: June 14, 2016
    Publication date: July 18, 2019
    Inventors: Egidijus VANAGAS, Dziugas KIMBARAS, Karolis Zilvinas BAZILEVICIUS