Patents by Inventor Karsten Peukert

Karsten Peukert has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • System and method for determining the temperature of a semiconductor wafer
    Patent number: 7274867
    Abstract: A system and method for determining the temperature of a semiconductor wafer at the time of thermal contact of the semiconductor wafer with a temperature sensing element. According to the invention, a temperature profile of the temperature sensing element is recorded from the time of thermal contact up to the time of thermal equilibrium between the semiconductor wafer and the temperature sensing element and the temperature of the semiconductor wafer at the time of thermal contact is determined on the basis of a time period between the time of thermal contact and the time of thermal equilibrium and the temperature TG of the semiconductor wafer reached at the time tG of thermal equilibrium is determined by back calculation with the aid of an equation derived from Newton's law of cooling.
    Type: Grant
    Filed: June 25, 2004
    Date of Patent: September 25, 2007
    Assignee: Infineon Technologies AG
    Inventor: Karsten Peukert
  • System and method for determining the temperature of a semiconductor wafer
    Publication number: 20050042778
    Abstract: A system and method for determining the temperature of a semiconductor wafer at the time of thermal contact of the semiconductor wafer with a temperature sensing element. According to the invention, a temperature profile of the temperature sensing element is recorded from the time of thermal contact up to the time of thermal equilibrium between the semiconductor wafer and the temperature sensing element and the temperature of the semiconductor wafer at the time of thermal contact is determined on the basis of a time period between the time of thermal contact and the time of thermal equilibrium and the temperature TG of the semiconductor wafer reached at the time tG of thermal equilibrium is determined by back calculation with the aid of an equation derived from Newton's law of cooling.
    Type: Application
    Filed: June 25, 2004
    Publication date: February 24, 2005
    Applicant: Infineon Technologies AG
    Inventor: Karsten Peukert