Abstract: Semiconductor processing chambers and systems, as well as methods of cleaning such chambers and systems are provided. Processing chambers and systems include a chamber body that defines a processing region, a liner positioned within the chamber body that defines a liner volume, a faceplate positioned atop the liner, a substrate support disposed within the chamber body, and a cleaning gas source coupled with the liner volume through a cleaning gas plenum and one or more inlet apertures. Systems and chambers include where at least one of the one or more inlet apertures is disposed in the processing region between the faceplate and a bottom wall of the chamber body.

Abstract: A method of forming regrown fiducials includes providing a III-V compound substrate having a device region and an alignment mark region. The III-V compound substrate is characterized by a processing surface. The method also includes forming a hardmask layer having a first set of openings in the device region exposing a first surface portion of the processing surface of the III-V compound substrate and a second set of openings in the alignment mark region exposing a second surface portion of the processing surface and etching the first surface portion and the second surface portion of the III-V compound substrate using the hardmask layer as a mask to form a plurality of trenches. The method also includes epitaxially regrowing a semiconductor layer in the trenches to form the regrown fiducials extending to a predetermined height over the processing surface in the alignment mark region.

Abstract: A method of forming alignment marks, each alignment mark including a plurality of fiducials, includes providing a III-V compound substrate having a device region and an alignment mark region. The method also includes forming a first hardmask in the device region and a hardmask structure in the alignment mark region, etching a first surface portion of the III-V compound substrate to form a plurality of trenches in the device region, and epitaxially regrowing a semiconductor layer in the trenches. The method further includes forming a second mask in the device region and a patterned structure in the alignment mark region. The patterned structure includes a set of masked regions corresponding to the plurality of fiducials and a second set of openings. The method also includes forming the plurality of fiducials.

Abstract: This disclosure describes methods, non-transitory computer readable storage media, and systems that generate a digital knowledge graph based on a plurality of tutorial content items to generate recommendations of digital resource items. Specifically, the disclosed system extracts a plurality of tasks, subject categories related to the tasks, and context signals related to an environment for the tasks from a plurality of tutorial content items for one or more digital content editing applications. The disclosed system generates a digital knowledge graph including nodes corresponding to the tasks and subject categories connected via edges based on relationships extracted from the tutorial content items. In some embodiments, the disclosed system also includes nodes corresponding to digital resource items in the digital knowledge graph or in a subgraph. The disclosed system utilizes the digital knowledge graph with context data to provide a recommendation of digital resource items for display at a client device.

Abstract: This disclosure describes methods, non-transitory computer readable storage media, and systems that generate a digital knowledge graph based on a plurality of tutorial content items to generate recommendations of digital resource items. Specifically, the disclosed system extracts a plurality of tasks, subject categories related to the tasks, and context signals related to an environment for the tasks from a plurality of tutorial content items for one or more digital content editing applications. The disclosed system generates a digital knowledge graph including nodes corresponding to the tasks and subject categories connected via edges based on relationships extracted from the tutorial content items. In some embodiments, the disclosed system also includes nodes corresponding to digital resource items in the digital knowledge graph or in a subgraph. The disclosed system utilizes the digital knowledge graph with context data to provide a recommendation of digital resource items for display at a client device.