Abstract: A MEMS sensor has a proof mass, a sense electrode, and a shield. At least a portion of the proof mass and shield may form a capacitor that causes an offset movement of the proof mass. A series of test values may be provided in order to minimize the offset movement or compensate for the offset movement. In some embodiments, the shield voltage may be modified to reduce the offset movement. Residual offsets due to other factors may also be determined and utilized for compensation to reduce an offset error in a sensed signal.

Abstract: A high-bandwidth AFM probe having a diffraction grating characterized by a diffraction characteristic that monotonically changes along the length of the diffraction grating is disclosed. AFM probes in accordance with the present invention are capable of high-sensitivity performance over a broad range of operating conditions, such as operating wavelength and measurement media. A method for estimating at least one physical property of a surface based on high-frequency signal components in the output signal from a high-bandwidth AFM probe is also disclosed. The method enables determination of tip-surface interaction forces based on the relationship between a first motion of the base of the AFM probe and a second motion of the tip of the AFM probe.

Abstract: A fiber-facet AFM probe enabling high-resolution, high sensitivity measurement of a sample surface is presented. AFM probes in accordance with the present invention include an optically resonant cavity that is defined by two mirrors, at least one of which is a photonic-crystal mirror. One of the mirrors is movable and is mechanically coupled with an AFM tip such that a force imparted on the tip by an interaction with the sample surface induces a change in the cavity length of the optically resonant cavity and, therefore, its reflectivity.