Patents by Inventor Kasin Jirawat

Kasin Jirawat has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Patent number: 6474355
    Abstract: The present invention provides a method and system for blowing dust and other foreign particles off semiconductor substrate surfaces. The system may blow ionized air, which neutralizes electrostatic charges on the substrate surface thereby facilitating the release of particles from the substrate and reducing the risk of damage to semiconductor substrates from electrostatic discharge. The system also provides a vacuum for capturing dust particles blown off the surface, thus preventing the particles from contaminating clean room environments and redepositing on the cleaned substrate or other substrates.
    Type: Grant
    Filed: October 12, 2000
    Date of Patent: November 5, 2002
    Assignee: Advanced Micro Devices, Inc.
    Inventors: Kasin Jirawat, Watana Sabyeying, Chuawalit Klanruengsang, Khanchit Suphanpesat