Patents by Inventor Kasiraman Krishnan
Kasiraman Krishnan has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).
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Patent number: 12023853Abstract: A polishing article manufacturing system includes a feed section and a take-up section, the take-up section comprising a supply roll having a polishing article disposed thereon for a chemical mechanical polishing process, a print section comprising a plurality of printheads disposed between the feed section and the take-up section, and a curing section disposed between the feed section and the take-up section, the curing section comprising one or both of a thermal curing device and an electromagnetic curing device.Type: GrantFiled: December 2, 2019Date of Patent: July 2, 2024Assignee: Applied Materials, Inc.Inventors: Kasiraman Krishnan, Daniel Redfield, Russell Edward Perry, Gregory E. Menk, Rajeev Bajaj, Fred C. Redeker, Nag B. Patibandla, Mahendra C. Orilall, Jason G. Fung
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Patent number: 11958162Abstract: Embodiments of the disclosure generally provide polishing pads having a composite pad body and methods for forming the polishing pads. In one embodiment, the composite pad body includes one or more first features formed from a first material or a first composition of materials, and one or more second features formed from a second material or a second composition of materials, wherein the one or more first features and the one or more second features are formed by depositing a plurality of layers comprising the first material or first composition of materials and second material or second composition of materials.Type: GrantFiled: January 17, 2020Date of Patent: April 16, 2024Assignee: Applied Materials, Inc.Inventors: Rajeev Bajaj, Kasiraman Krishnan, Mahendra C. Orilall, Daniel Redfield, Fred C. Redeker, Nag B. Patibandla, Gregory E. Menk, Jason G. Fung, Russell Edward Perry, Robert E. Davenport
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Patent number: 11794308Abstract: A method of fabricating a polishing layer of a polishing pad includes determining a desired distribution of particles to be embedded within a polymer matrix of the polishing layer. A plurality of layers of the polymer matrix is successively deposited with a 3D printer, each layer of the plurality of layers of polymer matrix being deposited by ejecting a polymer matrix precursor from a nozzle. A plurality of layers of the particles is successively deposited according to the desired distribution with the 3D printer. The polymer matrix precursor is solidified into a polymer matrix having the particles embedded in the desired distribution.Type: GrantFiled: June 19, 2018Date of Patent: October 24, 2023Assignee: Applied Materials, Inc.Inventors: Kasiraman Krishnan, Nag B. Patibandla, Periya Gopalan
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Patent number: 11446740Abstract: An additive manufacturing system includes a platen to support an object to be fabricated, a dispenser assembly positioned above the platen, and an energy source configured to selectively fuse a layer of powder. The dispenser assembly includes a first dispenser, a second dispenser, and a drive system. The first dispenser delivers a first powder in a first linear region that extends along a first axis, and the second dispenser delivers a second powder in a second linear region that extends parallel to the first linear region and is offset from the first linear region along a second axis perpendicular to the first axis. The drive system a drive system moves the support with the first dispenser and second dispenser together along the second axis.Type: GrantFiled: March 30, 2018Date of Patent: September 20, 2022Assignee: Applied Materials, Inc.Inventors: Christopher A. Rowland, Anantha K. Subramani, Kasiraman Krishnan, Kartik Ramaswamy, Thomas B. Brezoczky, Swaminathan Srinivasan, Jennifer Y. Sun, Simon Yavelberg, Srinivas D. Nemani, Nag B. Patibandla, Hou T. Ng
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Publication number: 20210205890Abstract: An additive manufacturing system includes a platen having a top surface to support an object being manufactured, a feed material dispenser to deliver a plurality of successive layers of feed material over the platen, an energy source positioned above the platen to fuse at least a portion of an outermost layer of feed material, and a coolant fluid dispenser to deliver a coolant fluid onto the outermost layer of feed material after at least a portion of the outermost layer has been fused.Type: ApplicationFiled: March 22, 2021Publication date: July 8, 2021Inventors: Hou T. Ng, Nag B. Patibandla, Ajey M. Joshi, Bharath Swaminathan, Ashavani Kumar, Eric Ng, Bernard Frey, Kasiraman Krishnan
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Publication number: 20210114106Abstract: Additive manufacturing includes successively forming a plurality of layers on a support. Depositing a layer from the plurality of layers includes dispensing first particles, selectively dispensing second particles in selected regions corresponding to a surface of the object, and fusing at least a portion of the layer. The layer has the first particles throughout and the second particles in the selected regions. Alternatively or in addition, forming the plurality of layers includes depositing multiple groups of layers. Depositing a group of layers includes, for each layer in the group of layers dispensing a feed material to provide the layer, and after dispensing the feed material and before dispensing a subsequent layer fusing a selected portion of the layer. After all layers in the group of layers are dispensed, a volume of the group of layers that extends through all the layers in the group of layers is fused.Type: ApplicationFiled: December 22, 2020Publication date: April 22, 2021Inventors: Hou T. Ng, Nag B. Patibandla, Ajey M. Joshi, Bharath Swaminathan, Ashavani Kumar, Eric Ng, Bernard Frey, Kasiraman Krishnan
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Patent number: 10981227Abstract: An additive manufacturing system includes a platen having a top surface, a support structure, a powder dispenser coupled to the support structure and positioned above the platen and configured to deliver a powder in a linear region that extends along a first axis, a gas dispenser coupled to the support structure in a fixed position relative to the powder dispenser and having an outlet to deliver a gas across the outermost layer of feed material, an energy source configured to selectively fused the layer of powder, and an actuator coupled to the support to move the support with the powder dispenser and the gas dispenser together along a second axis perpendicular to the first axis and parallel to the top surface such that the linear region and the outlet sweep along the second axis to deposit the powder in a swath over the platen and deliver the gas.Type: GrantFiled: March 30, 2018Date of Patent: April 20, 2021Assignee: Applied Materials, Inc.Inventors: Hou T. Ng, Nag B. Patibandla, Ajey M. Joshi, Bharath Swaminathan, Ashavani Kumar, Eric Ng, Bernard Frey, Kasiraman Krishnan
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Patent number: 10882111Abstract: Additive manufacturing includes successively forming a plurality of layers on a support. Depositing a layer from the plurality of layers includes dispensing first particles, selectively dispensing second particles in selected regions corresponding to a surface of the object, and fusing at least a portion of the layer. The layer has the first particles throughout and the second particles in the selected regions. Alternatively or in addition, forming the plurality of layers includes depositing multiple groups of layers. Depositing a group of layers includes, for each layer in the group of layers dispensing a feed material to provide the layer, and after dispensing the feed material and before dispensing a subsequent layer fusing a selected portion of the layer. After all layers in the group of layers are dispensed, a volume of the group of layers that extends through all the layers in the group of layers is fused.Type: GrantFiled: July 15, 2016Date of Patent: January 5, 2021Assignee: Applied Materials, Inc.Inventors: Hou T. Ng, Nag B. Patibandla, Ajey M. Joshi, Bharath Swaminathan, Ashavani Kumar, Eric Ng, Bernard Frey, Kasiraman Krishnan
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Patent number: 10875093Abstract: Additive manufacturing includes successively forming a plurality of layers on a support. Depositing a layer from the plurality of layers includes dispensing first particles, selectively dispensing second particles in selected regions corresponding to a surface of the object, and fusing at least a portion of the layer. The layer has the first particles throughout and the second particles in the selected regions. Alternatively or in addition, forming the plurality of layers includes depositing multiple groups of layers. Depositing a group of layers includes, for each layer in the group of layers dispensing a feed material to provide the layer, and after dispensing the feed material and before dispensing a subsequent layer fusing a selected portion of the layer. After all layers in the group of layers are dispensed, a volume of the group of layers that extends through all the layers in the group of layers is fused.Type: GrantFiled: July 15, 2016Date of Patent: December 29, 2020Assignee: Applied Materials, Inc.Inventors: Hou T. Ng, Nag B. Patibandla, Ajey M. Joshi, Bharath Swaminathan, Ashavani Kumar, Eric Ng, Bernard Frey, Kasiraman Krishnan
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Patent number: 10780497Abstract: An additive manufacturing apparatus for forming a part includes a support, a first dispenser to deliver a layer of first particles on a support or an underlying layer on the support, a second dispenser to deliver second particles onto the layer of first particles such that the second particles infiltrate into the layer of first particles, an energy source to fuse the first particle and second particles to form a fused layer of the part, and a controller coupled to the first dispenser, second dispenser and energy source.Type: GrantFiled: June 17, 2016Date of Patent: September 22, 2020Assignee: Applied Materials, Inc.Inventors: Hou T. Ng, Nag B. Patibandla, Ajey M. Joshi, Ashavani Kumar, Kasiraman Krishnan
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Patent number: 10668533Abstract: An additive manufacturing system includes a platen having a top surface to support an object being manufactured, a feed material dispenser to deliver a plurality of successive layers of feed material over the platen, an energy source positioned above the platen to fuse at least a portion of an outermost layer of feed material, and a coolant fluid dispenser to deliver a coolant fluid onto the outermost layer of feed material after at least a portion of the outermost layer has been fused.Type: GrantFiled: July 15, 2016Date of Patent: June 2, 2020Assignee: Applied Materials, Inc.Inventors: Hou T. Ng, Nag B. Patibandla, Ajey M. Joshi, Bharath Swaminathan, Ashavani Kumar, Eric Ng, Bernard Frey, Kasiraman Krishnan
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Publication number: 20200147750Abstract: Embodiments of the disclosure generally provide polishing pads having a composite pad body and methods for forming the polishing pads. In one embodiment, the composite pad body includes one or more first features formed from a first material or a first composition of materials, and one or more second features formed from a second material or a second composition of materials, wherein the one or more first features and the one or more second features are formed by depositing a plurality of layers comprising the first material or first composition of materials and second material or second composition of materials.Type: ApplicationFiled: January 17, 2020Publication date: May 14, 2020Inventors: Rajeev BAJAJ, Kasiraman KRISHNAN, Mahendra C. ORILALL, Daniel REDFIELD, Fred C. REDEKER, Nag B. PATIBANDLA, Gregory E. MENK, Jason G. FUNG, Russell Edward PERRY, Robert E. DAVENPORT
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Patent number: 10625338Abstract: Additive manufacturing of an object includes dispensing a plurality of successive layers of powder over a top surface of a platform, fusing an object region in each of the plurality of successive layers to form the object, and fusing a brace region in a particular layer from the plurality of layers to form a brace structure to inhibit lateral motion of the powder. The brace structure is spaced apart from the particular object region by a gap of unfused powder.Type: GrantFiled: July 15, 2016Date of Patent: April 21, 2020Assignee: Applied Materials, Inc.Inventors: Hou T. Ng, Nag B. Patibandla, Ajey M. Joshi, Bharath Swaminathan, Ashavani Kumar, Eric Ng, Bernard Frey, Kasiraman Krishnan
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Publication number: 20200101657Abstract: A polishing article manufacturing system includes a feed section and a take-up section, the take-up section comprising a supply roll having a polishing article disposed thereon for a chemical mechanical polishing process, a print section comprising a plurality of printheads disposed between the feed section and the take-up section, and a curing section disposed between the feed section and the take-up section, the curing section comprising one or both of a thermal curing device and an electromagnetic curing device.Type: ApplicationFiled: December 2, 2019Publication date: April 2, 2020Inventors: Kasiraman KRISHNAN, Daniel REDFIELD, Russell Edward PERRY, Gregory E. MENK, Rajeev BAJAJ, Fred C. REDEKER, Nag B. PATIBANDLA, Mahendra C. ORILALL, Jason G. FUNG
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Patent number: 10537974Abstract: Embodiments of the disclosure generally provide polishing pads includes a composite pad body and methods for forming the polishing pads. One embodiment provides a polishing pad including a composite pad body. The composite pad body includes one or more first features formed from a first material or a first composition of materials, and one or more second features formed from a second material or a second composition of materials, wherein the one or more first features and the one or more second features are formed by depositing a plurality of layers comprising the first material or first composition of materials and second material or second composition of materials.Type: GrantFiled: January 22, 2018Date of Patent: January 21, 2020Assignee: APPLIED MATERIALS, INC.Inventors: Rajeev Bajaj, Kasiraman Krishnan, Mahendra C. Orilall, Daniel Redfield, Fred C. Redeker, Nag B. Patibandla, Gregory E. Menk, Jason G. Fung, Russell Edward Perry, Robert E. Davenport
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Patent number: 10493691Abstract: A polishing article manufacturing system includes a feed section and a take-up section, the take-up section comprising a supply roll having a polishing article disposed thereon for a chemical mechanical polishing process, a print section comprising a plurality of printheads disposed between the feed section and the take-up section, and a curing section disposed between the feed section and the take-up section, the curing section comprising one or both of a thermal curing device and an electromagnetic curing device.Type: GrantFiled: October 2, 2017Date of Patent: December 3, 2019Assignee: APPLIED MATERIALS, INC.Inventors: Kasiraman Krishnan, Daniel Redfield, Russell Edward Perry, Gregory E. Menk, Rajeev Bajaj, Fred C. Redeker, Nag B. Patibandla, Mahendra C. Orilall, Jason G. Fung
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Publication number: 20190299357Abstract: A method of fabricating a polishing layer of a polishing pad includes successively depositing a plurality of layers with a 3D printer, each layer of the plurality of polishing layers deposited by ejecting a base material from a first nozzle and an additive material from a second nozzle and solidifying the base and additive material to form a solidified pad material.Type: ApplicationFiled: June 17, 2019Publication date: October 3, 2019Inventors: Mahendra Christopher ORILALL, Timothy MICHAELSON, Kasiraman KRISHNAN, Rajeev BAJAJ, Nag B. PATIBANDLA, Daniel REDFIELD, Fred C. REDEKER, Gregory E. MENK
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Patent number: 10384265Abstract: A method of additive manufacturing include delivering at least one layer by either depositing a uniform layer of powder on a support and then removing a portion of the layer with a roller with a surface having spatially controlled electrostatic charge, or by depositing powder onto the surface of the roller and moving the roller relative to a support such that the spatially controllable electrostatic charge on the surface of the roller causes transfer of a corresponding portion of the powder from the roller onto the support or an underlying layer.Type: GrantFiled: June 17, 2016Date of Patent: August 20, 2019Assignee: Applied Materials, Inc.Inventors: Bharath Swaminathan, Ajey M. Joshi, Nag B. Patibandla, Hou T. Ng, Ashavani Kumar, Eric Ng, Bernard Frey, Kasiraman Krishnan
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Patent number: 10335856Abstract: An additive manufacturing system includes a platen having a top surface to support an object being manufactured, a dispenser to deliver a plurality of successive layers of precursor material over the platen, a plurality of lamps disposed below the top surface of the platen to heat the platen, and an energy source to fuse at least some of the outermost layer of precursor material.Type: GrantFiled: June 28, 2016Date of Patent: July 2, 2019Assignee: Applied Materials, Inc.Inventors: Bharath Swaminathan, Eric Ng, Nag B. Patibandla, Hou T. Ng, Ashavani Kumar, Ajey M. Joshi, Bernard Frey, Kasiraman Krishnan
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Patent number: 10322491Abstract: A method of fabricating a polishing layer of a polishing pad includes successively depositing a plurality of layers with a 3D printer, each layer of the plurality of polishing layers deposited by ejecting a base material from a first nozzle and an additive material from a second nozzle and solidifying the base and additive material to form a solidified pad material.Type: GrantFiled: October 16, 2015Date of Patent: June 18, 2019Assignee: APPLIED MATERIALS, INC.Inventors: Mahendra Christopher Orilall, Timothy Michaelson, Kasiraman Krishnan, Rajeev Bajaj, Nag B. Patibandla, Daniel Redfield, Fred C. Redeker, Gregory E. Menk