Patents by Inventor Katharina Gries

Katharina Gries has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Method and apparatus for examining a beam of charged particles
    Patent number: 11961705
    Abstract: The present invention relates to a method for examining a beam of charged particles, including the following steps: producing persistent interactions of the beam with a sample at a plurality of positions of the sample relative to the beam and deriving at least one property of the beam by analyzing the spatial distribution of the persistent interactions at the plurality of positions.
    Type: Grant
    Filed: December 22, 2020
    Date of Patent: April 16, 2024
    Assignee: Carl Zeiss SMT GmbH
    Inventors: Daniel Rhinow, Markus Bauer, Rainer Fettig, David Lämmle, Marion Batz, Katharina Gries, Sebastian Vollmar, Petra Spies, Ottmar Hoinkis
  • METHOD AND APPARATUS FOR EXAMINING A BEAM OF CHARGED PARTICLES
    Publication number: 20210110996
    Abstract: The present invention relates to a method for examining a beam of charged particles, including the following steps: producing persistent interactions of the beam with a sample at a plurality of positions of the sample relative to the beam and deriving at least one property of the beam by analyzing the spatial distribution of the persistent interactions at the plurality of positions.
    Type: Application
    Filed: December 22, 2020
    Publication date: April 15, 2021
    Inventors: Daniel Rhinow, Markus Bauer, Rainer Fettig, David Lämmle, Marion Batz, Katharina Gries, Sebastian Vollmar, Petra Spies, Ottmar Hoinkis